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- W1968811823 abstract "Due to high lattice mismatch, heterostructures of III-nitrides are subject to plastic relaxation. In this paper, we focus on the relaxation of AlGaN films grown on GaN. This relaxation is realised by cracking followed by the introduction of misfit dislocations. We describe those mechanisms and present a method to grow thick high quality crack-free AlGaN layers. This method uses jointly plastic relaxation and lateral growth." @default.
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- W1968811823 date "2004-07-01" @default.
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- W1968811823 title "Plastic relaxation through buried cracks in AlGaN/GaN heterostructures" @default.
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- W1968811823 doi "https://doi.org/10.1051/epjap:2004119-3" @default.
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