Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968897003> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W1968897003 abstract "Abstract The growth rate reduction of metalorganic vapor-phase epitaxy (MOVPE) vanadium-doped GaAs layer by vanadium tetrachloride (VCl 4 ) was studied. Laser reflectometry was used to monitor this reduction as a function of the VCl 4 flow rate and substrate temperature. A growth rate reduction up to 60% has been observed. The growth rate reduction follows a sublinear variation with the flow rate of VCl 4 and exhibits Arrhenius temperature dependence with an activation energy of 1.3 eV. Thermodynamic calculations, based on the minimization of the Gibbs energy, have been performed on input system containing arsine, trimethylgallium, hydrogen and vanadium tetrachloride. It is found that the growth rate reduction is essentially due to the GaCl formation in gas and/or solid phase. The thermodynamics equilibrium results are very close to those obtained experimentally." @default.
- W1968897003 created "2016-06-24" @default.
- W1968897003 creator A5031633122 @default.
- W1968897003 creator A5036483091 @default.
- W1968897003 creator A5074130720 @default.
- W1968897003 creator A5076537517 @default.
- W1968897003 date "1999-11-01" @default.
- W1968897003 modified "2023-09-27" @default.
- W1968897003 title "Thermodynamic analysis of growth rate reduction by VCl4 during metalorganic vapor-phase epitaxy of GaAs" @default.
- W1968897003 cites W1982757810 @default.
- W1968897003 cites W2061523078 @default.
- W1968897003 cites W2070051301 @default.
- W1968897003 cites W2088814234 @default.
- W1968897003 cites W2090022320 @default.
- W1968897003 cites W2090375975 @default.
- W1968897003 cites W2478121256 @default.
- W1968897003 doi "https://doi.org/10.1016/s0022-0248(99)00349-8" @default.
- W1968897003 hasPublicationYear "1999" @default.
- W1968897003 type Work @default.
- W1968897003 sameAs 1968897003 @default.
- W1968897003 citedByCount "8" @default.
- W1968897003 countsByYear W19688970032015 @default.
- W1968897003 countsByYear W19688970032019 @default.
- W1968897003 crossrefType "journal-article" @default.
- W1968897003 hasAuthorship W1968897003A5031633122 @default.
- W1968897003 hasAuthorship W1968897003A5036483091 @default.
- W1968897003 hasAuthorship W1968897003A5074130720 @default.
- W1968897003 hasAuthorship W1968897003A5076537517 @default.
- W1968897003 hasConcept C110738630 @default.
- W1968897003 hasConcept C113196181 @default.
- W1968897003 hasConcept C147789679 @default.
- W1968897003 hasConcept C161790260 @default.
- W1968897003 hasConcept C175665537 @default.
- W1968897003 hasConcept C178790620 @default.
- W1968897003 hasConcept C179104552 @default.
- W1968897003 hasConcept C185592680 @default.
- W1968897003 hasConcept C2524010 @default.
- W1968897003 hasConcept C2776776902 @default.
- W1968897003 hasConcept C2777716191 @default.
- W1968897003 hasConcept C2778312390 @default.
- W1968897003 hasConcept C2779227376 @default.
- W1968897003 hasConcept C2779668472 @default.
- W1968897003 hasConcept C33923547 @default.
- W1968897003 hasConcept C504678139 @default.
- W1968897003 hasConcept C86183883 @default.
- W1968897003 hasConcept C95121573 @default.
- W1968897003 hasConceptScore W1968897003C110738630 @default.
- W1968897003 hasConceptScore W1968897003C113196181 @default.
- W1968897003 hasConceptScore W1968897003C147789679 @default.
- W1968897003 hasConceptScore W1968897003C161790260 @default.
- W1968897003 hasConceptScore W1968897003C175665537 @default.
- W1968897003 hasConceptScore W1968897003C178790620 @default.
- W1968897003 hasConceptScore W1968897003C179104552 @default.
- W1968897003 hasConceptScore W1968897003C185592680 @default.
- W1968897003 hasConceptScore W1968897003C2524010 @default.
- W1968897003 hasConceptScore W1968897003C2776776902 @default.
- W1968897003 hasConceptScore W1968897003C2777716191 @default.
- W1968897003 hasConceptScore W1968897003C2778312390 @default.
- W1968897003 hasConceptScore W1968897003C2779227376 @default.
- W1968897003 hasConceptScore W1968897003C2779668472 @default.
- W1968897003 hasConceptScore W1968897003C33923547 @default.
- W1968897003 hasConceptScore W1968897003C504678139 @default.
- W1968897003 hasConceptScore W1968897003C86183883 @default.
- W1968897003 hasConceptScore W1968897003C95121573 @default.
- W1968897003 hasLocation W19688970031 @default.
- W1968897003 hasOpenAccess W1968897003 @default.
- W1968897003 hasPrimaryLocation W19688970031 @default.
- W1968897003 hasRelatedWork W1971301163 @default.
- W1968897003 hasRelatedWork W1982757810 @default.
- W1968897003 hasRelatedWork W1990993445 @default.
- W1968897003 hasRelatedWork W1995478256 @default.
- W1968897003 hasRelatedWork W2001934469 @default.
- W1968897003 hasRelatedWork W2007343968 @default.
- W1968897003 hasRelatedWork W2009163744 @default.
- W1968897003 hasRelatedWork W2016567556 @default.
- W1968897003 hasRelatedWork W2020398434 @default.
- W1968897003 hasRelatedWork W2021143693 @default.
- W1968897003 hasRelatedWork W2044785851 @default.
- W1968897003 hasRelatedWork W2046399174 @default.
- W1968897003 hasRelatedWork W2046829813 @default.
- W1968897003 hasRelatedWork W2064826525 @default.
- W1968897003 hasRelatedWork W2065161981 @default.
- W1968897003 hasRelatedWork W2073484252 @default.
- W1968897003 hasRelatedWork W2088814234 @default.
- W1968897003 hasRelatedWork W2090022320 @default.
- W1968897003 hasRelatedWork W2138396684 @default.
- W1968897003 hasRelatedWork W2142789179 @default.
- W1968897003 isParatext "false" @default.
- W1968897003 isRetracted "false" @default.
- W1968897003 magId "1968897003" @default.
- W1968897003 workType "article" @default.