FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1968951780> ?p ?o ?g. }

• W1968951780 endingPage "455" @default.
• W1968951780 startingPage "450" @default.
• W1968951780 abstract "The pH-sensing properties of silicon nitride were studied with special emphazise on surface oxidation. Simulations of the surface potential and the sensitivity were performed using the site binding theory to show the influence of an oxygen rich surface and surface oxidation of silicon nitride. Samples were produced by depositing silicon nitride in a LPCVD process with flow ratios of the processing gases NH3 and SiCl2H2 ranging from 2 to 20. The samples were characterized by XPS and capacitance–voltage measurements of EIS-structures. Silicon nitride etched in buffered HF before measurement showed a pH-sensitivity of up to 58 mV pH−1, and an increasing hysteresis was found with increasing NH3/SiCl2H2 gas-flow ratios during deposition. Samples not etched had only a pH-sensitivity between 45 and 52 mV pH−1 because of their oxygen rich surface layer. The oxygen rich layer was found to be approx. 4 nm deep and soluble in buffer electrolyte. Surface oxidation and dissolution of the oxygen rich layer is claimed to be decisive for the pH-sensing properties of silicon nitride." @default.
• W1968951780 created "2016-06-24" @default.
• W1968951780 creator A5003850300 @default.
• W1968951780 creator A5012487905 @default.
• W1968951780 creator A5074193681 @default.
• W1968951780 creator A5036097641 @default.
• W1968951780 date "1999-09-01" @default.
• W1968951780 modified "2023-10-01" @default.
• W1968951780 title "The influence of surface oxidation on the pH-sensing properties of silicon nitride" @default.
• W1968951780 cites W1997558313 @default.
• W1968951780 cites W2008259111 @default.
• W1968951780 cites W2029562724 @default.
• W1968951780 cites W2049884136 @default.
• W1968951780 cites W2054109584 @default.
• W1968951780 cites W2056293139 @default.
• W1968951780 cites W2056686535 @default.
• W1968951780 cites W2058763428 @default.
• W1968951780 cites W2085477285 @default.
• W1968951780 doi "https://doi.org/10.1016/s0925-4005(99)00125-2" @default.
• W1968951780 hasPublicationYear "1999" @default.
• W1968951780 type Work @default.
• W1968951780 sameAs 1968951780 @default.
• W1968951780 citedByCount "25" @default.
• W1968951780 countsByYear W19689517802013 @default.
• W1968951780 countsByYear W19689517802015 @default.
• W1968951780 countsByYear W19689517802018 @default.
• W1968951780 countsByYear W19689517802019 @default.
• W1968951780 countsByYear W19689517802021 @default.
• W1968951780 countsByYear W19689517802022 @default.
• W1968951780 crossrefType "journal-article" @default.
• W1968951780 hasAuthorship W1968951780A5003850300 @default.
• W1968951780 hasAuthorship W1968951780A5012487905 @default.
• W1968951780 hasAuthorship W1968951780A5036097641 @default.
• W1968951780 hasAuthorship W1968951780A5074193681 @default.
• W1968951780 hasConcept C113196181 @default.
• W1968951780 hasConcept C127413603 @default.
• W1968951780 hasConcept C147789679 @default.
• W1968951780 hasConcept C151730666 @default.
• W1968951780 hasConcept C171250308 @default.
• W1968951780 hasConcept C17525397 @default.
• W1968951780 hasConcept C175708663 @default.
• W1968951780 hasConcept C178790620 @default.
• W1968951780 hasConcept C179104552 @default.
• W1968951780 hasConcept C185592680 @default.
• W1968951780 hasConcept C192562407 @default.
• W1968951780 hasConcept C194760766 @default.
• W1968951780 hasConcept C2777431650 @default.
• W1968951780 hasConcept C2779227376 @default.
• W1968951780 hasConcept C2816523 @default.
• W1968951780 hasConcept C42360764 @default.
• W1968951780 hasConcept C43617362 @default.
• W1968951780 hasConcept C49040817 @default.
• W1968951780 hasConcept C540031477 @default.
• W1968951780 hasConcept C544956773 @default.
• W1968951780 hasConcept C64297162 @default.
• W1968951780 hasConcept C68801617 @default.
• W1968951780 hasConcept C86803240 @default.
• W1968951780 hasConcept C88380143 @default.
• W1968951780 hasConceptScore W1968951780C113196181 @default.
• W1968951780 hasConceptScore W1968951780C127413603 @default.
• W1968951780 hasConceptScore W1968951780C147789679 @default.
• W1968951780 hasConceptScore W1968951780C151730666 @default.
• W1968951780 hasConceptScore W1968951780C171250308 @default.
• W1968951780 hasConceptScore W1968951780C17525397 @default.
• W1968951780 hasConceptScore W1968951780C175708663 @default.
• W1968951780 hasConceptScore W1968951780C178790620 @default.
• W1968951780 hasConceptScore W1968951780C179104552 @default.
• W1968951780 hasConceptScore W1968951780C185592680 @default.
• W1968951780 hasConceptScore W1968951780C192562407 @default.
• W1968951780 hasConceptScore W1968951780C194760766 @default.
• W1968951780 hasConceptScore W1968951780C2777431650 @default.
• W1968951780 hasConceptScore W1968951780C2779227376 @default.
• W1968951780 hasConceptScore W1968951780C2816523 @default.
• W1968951780 hasConceptScore W1968951780C42360764 @default.
• W1968951780 hasConceptScore W1968951780C43617362 @default.
• W1968951780 hasConceptScore W1968951780C49040817 @default.
• W1968951780 hasConceptScore W1968951780C540031477 @default.
• W1968951780 hasConceptScore W1968951780C544956773 @default.
• W1968951780 hasConceptScore W1968951780C64297162 @default.
• W1968951780 hasConceptScore W1968951780C68801617 @default.
• W1968951780 hasConceptScore W1968951780C86803240 @default.
• W1968951780 hasConceptScore W1968951780C88380143 @default.
• W1968951780 hasIssue "1-3" @default.
• W1968951780 hasLocation W19689517801 @default.
• W1968951780 hasOpenAccess W1968951780 @default.
• W1968951780 hasPrimaryLocation W19689517801 @default.
• W1968951780 hasRelatedWork W1975826020 @default.
• W1968951780 hasRelatedWork W1982526145 @default.
• W1968951780 hasRelatedWork W2004633082 @default.
• W1968951780 hasRelatedWork W2067733017 @default.
• W1968951780 hasRelatedWork W2069752375 @default.
• W1968951780 hasRelatedWork W2275363478 @default.
• W1968951780 hasRelatedWork W2328924373 @default.
• W1968951780 hasRelatedWork W4225347794 @default.
• W1968951780 hasRelatedWork W4321263035 @default.
• W1968951780 hasRelatedWork W56559654 @default.
• W1968951780 hasVolume "58" @default.
• W1968951780 isParatext "false" @default.

• next