Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969035953> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W1969035953 endingPage "116" @default.
- W1969035953 startingPage "113" @default.
- W1969035953 abstract "The paper is devoted to the development of a new method for the determination of the anisotropic etching rate (AER) and the geometry of V-grooved structures on the basis of scanning electron microscopy (SEM) measurements. The method is non-destructive and consists of a three-dimensional (3-D) reconstruction of electron objects from a set of SEM micrographs. The real geometry and the AER of V-groove structures obtained by different anisotropic etchants have been investigated. The angles between the faces of the V-grooves are computed and compared with the angles between the theoretically expected crystallographic planes. Asymmetry between the corresponding planes upon using different etchants has been observed. The estimated etching rate of Si(100) is in full agreement with the already published results." @default.
- W1969035953 created "2016-06-24" @default.
- W1969035953 creator A5012339806 @default.
- W1969035953 date "1995-11-01" @default.
- W1969035953 modified "2023-10-16" @default.
- W1969035953 title "Anisotropic etching of Si (100) studied by scanning electron microscopy" @default.
- W1969035953 cites W1977625162 @default.
- W1969035953 cites W2068051191 @default.
- W1969035953 cites W2082702838 @default.
- W1969035953 cites W2137178805 @default.
- W1969035953 cites W2141442197 @default.
- W1969035953 doi "https://doi.org/10.1016/0924-4247(95)01015-s" @default.
- W1969035953 hasPublicationYear "1995" @default.
- W1969035953 type Work @default.
- W1969035953 sameAs 1969035953 @default.
- W1969035953 citedByCount "1" @default.
- W1969035953 crossrefType "journal-article" @default.
- W1969035953 hasAuthorship W1969035953A5012339806 @default.
- W1969035953 hasConcept C100460472 @default.
- W1969035953 hasConcept C120665830 @default.
- W1969035953 hasConcept C121332964 @default.
- W1969035953 hasConcept C147120987 @default.
- W1969035953 hasConcept C159985019 @default.
- W1969035953 hasConcept C171250308 @default.
- W1969035953 hasConcept C185592680 @default.
- W1969035953 hasConcept C191897082 @default.
- W1969035953 hasConcept C192562407 @default.
- W1969035953 hasConcept C2524010 @default.
- W1969035953 hasConcept C26771246 @default.
- W1969035953 hasConcept C2779227376 @default.
- W1969035953 hasConcept C2779472054 @default.
- W1969035953 hasConcept C33220542 @default.
- W1969035953 hasConcept C33923547 @default.
- W1969035953 hasConcept C62520636 @default.
- W1969035953 hasConcept C8010536 @default.
- W1969035953 hasConcept C85725439 @default.
- W1969035953 hasConcept C93877712 @default.
- W1969035953 hasConceptScore W1969035953C100460472 @default.
- W1969035953 hasConceptScore W1969035953C120665830 @default.
- W1969035953 hasConceptScore W1969035953C121332964 @default.
- W1969035953 hasConceptScore W1969035953C147120987 @default.
- W1969035953 hasConceptScore W1969035953C159985019 @default.
- W1969035953 hasConceptScore W1969035953C171250308 @default.
- W1969035953 hasConceptScore W1969035953C185592680 @default.
- W1969035953 hasConceptScore W1969035953C191897082 @default.
- W1969035953 hasConceptScore W1969035953C192562407 @default.
- W1969035953 hasConceptScore W1969035953C2524010 @default.
- W1969035953 hasConceptScore W1969035953C26771246 @default.
- W1969035953 hasConceptScore W1969035953C2779227376 @default.
- W1969035953 hasConceptScore W1969035953C2779472054 @default.
- W1969035953 hasConceptScore W1969035953C33220542 @default.
- W1969035953 hasConceptScore W1969035953C33923547 @default.
- W1969035953 hasConceptScore W1969035953C62520636 @default.
- W1969035953 hasConceptScore W1969035953C8010536 @default.
- W1969035953 hasConceptScore W1969035953C85725439 @default.
- W1969035953 hasConceptScore W1969035953C93877712 @default.
- W1969035953 hasIssue "2-3" @default.
- W1969035953 hasLocation W19690359531 @default.
- W1969035953 hasOpenAccess W1969035953 @default.
- W1969035953 hasPrimaryLocation W19690359531 @default.
- W1969035953 hasRelatedWork W1971115288 @default.
- W1969035953 hasRelatedWork W1972458659 @default.
- W1969035953 hasRelatedWork W1988915342 @default.
- W1969035953 hasRelatedWork W2012306734 @default.
- W1969035953 hasRelatedWork W2042302980 @default.
- W1969035953 hasRelatedWork W2061552042 @default.
- W1969035953 hasRelatedWork W2074254893 @default.
- W1969035953 hasRelatedWork W2149832335 @default.
- W1969035953 hasRelatedWork W2359230536 @default.
- W1969035953 hasRelatedWork W2795147553 @default.
- W1969035953 hasVolume "51" @default.
- W1969035953 isParatext "false" @default.
- W1969035953 isRetracted "false" @default.
- W1969035953 magId "1969035953" @default.
- W1969035953 workType "article" @default.