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- W1969128568 abstract "Summary form only given. Plasma-assisted technologies are widely used techniques for material treatment. The unevenness of treated substrates can cause problems in case when the active particles in plasma do not reach the whole surface. The presence of external magnetic field changes the behavior of plasma and therefore, the efficiency of the treatment can alter too. Besides the magnetic field, the motion of charged particles is influenced by several other factors as plasma pressure, substrate bias, etc. The theoretical prediction of the treating process is difficult especially when the active plasma species are reactive. Such problems can be effectively analyzed by computer simulations. Despite of their time requirements, the particle models provide us with the most detailed output information including particle fluxes to the substrate, their energy and angular distributions, spatial distributions of electrostatic potential, number densities of charged species, etc." @default.
- W1969128568 created "2016-06-24" @default.
- W1969128568 creator A5003745409 @default.
- W1969128568 creator A5045652948 @default.
- W1969128568 creator A5062731010 @default.
- W1969128568 date "2012-07-01" @default.
- W1969128568 modified "2023-09-25" @default.
- W1969128568 title "Simulation of plasma treatment of uneven substrates in magnetic field" @default.
- W1969128568 cites W2051917325 @default.
- W1969128568 cites W2065789081 @default.
- W1969128568 doi "https://doi.org/10.1109/plasma.2012.6383811" @default.
- W1969128568 hasPublicationYear "2012" @default.
- W1969128568 type Work @default.
- W1969128568 sameAs 1969128568 @default.
- W1969128568 citedByCount "0" @default.
- W1969128568 crossrefType "proceedings-article" @default.
- W1969128568 hasAuthorship W1969128568A5003745409 @default.
- W1969128568 hasAuthorship W1969128568A5045652948 @default.
- W1969128568 hasAuthorship W1969128568A5062731010 @default.
- W1969128568 hasConcept C111368507 @default.
- W1969128568 hasConcept C115260700 @default.
- W1969128568 hasConcept C121332964 @default.
- W1969128568 hasConcept C127313418 @default.
- W1969128568 hasConcept C145148216 @default.
- W1969128568 hasConcept C15227799 @default.
- W1969128568 hasConcept C159467904 @default.
- W1969128568 hasConcept C184779094 @default.
- W1969128568 hasConcept C185544564 @default.
- W1969128568 hasConcept C192039680 @default.
- W1969128568 hasConcept C192562407 @default.
- W1969128568 hasConcept C2777289219 @default.
- W1969128568 hasConcept C2778517922 @default.
- W1969128568 hasConcept C30475298 @default.
- W1969128568 hasConcept C35048267 @default.
- W1969128568 hasConcept C57879066 @default.
- W1969128568 hasConcept C62520636 @default.
- W1969128568 hasConcept C69786480 @default.
- W1969128568 hasConcept C82706917 @default.
- W1969128568 hasConcept C85344455 @default.
- W1969128568 hasConceptScore W1969128568C111368507 @default.
- W1969128568 hasConceptScore W1969128568C115260700 @default.
- W1969128568 hasConceptScore W1969128568C121332964 @default.
- W1969128568 hasConceptScore W1969128568C127313418 @default.
- W1969128568 hasConceptScore W1969128568C145148216 @default.
- W1969128568 hasConceptScore W1969128568C15227799 @default.
- W1969128568 hasConceptScore W1969128568C159467904 @default.
- W1969128568 hasConceptScore W1969128568C184779094 @default.
- W1969128568 hasConceptScore W1969128568C185544564 @default.
- W1969128568 hasConceptScore W1969128568C192039680 @default.
- W1969128568 hasConceptScore W1969128568C192562407 @default.
- W1969128568 hasConceptScore W1969128568C2777289219 @default.
- W1969128568 hasConceptScore W1969128568C2778517922 @default.
- W1969128568 hasConceptScore W1969128568C30475298 @default.
- W1969128568 hasConceptScore W1969128568C35048267 @default.
- W1969128568 hasConceptScore W1969128568C57879066 @default.
- W1969128568 hasConceptScore W1969128568C62520636 @default.
- W1969128568 hasConceptScore W1969128568C69786480 @default.
- W1969128568 hasConceptScore W1969128568C82706917 @default.
- W1969128568 hasConceptScore W1969128568C85344455 @default.
- W1969128568 hasLocation W19691285681 @default.
- W1969128568 hasOpenAccess W1969128568 @default.
- W1969128568 hasPrimaryLocation W19691285681 @default.
- W1969128568 hasRelatedWork W1971533730 @default.
- W1969128568 hasRelatedWork W1981778308 @default.
- W1969128568 hasRelatedWork W1982858295 @default.
- W1969128568 hasRelatedWork W1985248226 @default.
- W1969128568 hasRelatedWork W2006924175 @default.
- W1969128568 hasRelatedWork W2022787052 @default.
- W1969128568 hasRelatedWork W2041101303 @default.
- W1969128568 hasRelatedWork W2045058770 @default.
- W1969128568 hasRelatedWork W2065725905 @default.
- W1969128568 hasRelatedWork W2071182870 @default.
- W1969128568 hasRelatedWork W2099658708 @default.
- W1969128568 hasRelatedWork W2115808644 @default.
- W1969128568 hasRelatedWork W2146154454 @default.
- W1969128568 hasRelatedWork W2272300596 @default.
- W1969128568 hasRelatedWork W2751074450 @default.
- W1969128568 hasRelatedWork W3005515286 @default.
- W1969128568 hasRelatedWork W3210664977 @default.
- W1969128568 hasRelatedWork W645755886 @default.
- W1969128568 hasRelatedWork W1982447702 @default.
- W1969128568 hasRelatedWork W2110755491 @default.
- W1969128568 isParatext "false" @default.
- W1969128568 isRetracted "false" @default.
- W1969128568 magId "1969128568" @default.
- W1969128568 workType "article" @default.