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- W1969131306 endingPage "18" @default.
- W1969131306 startingPage "14" @default.
- W1969131306 abstract "The characteristics of charge trapping and interface states for low temperature chemical vapor deposition (LTCVD) oxide formed on 4H-SiC as carbon-free gate oxide has been studied. Observation of a large flatband voltage shift indicated the presence of many negative oxide charges in the as-deposited LTCVD oxide. Heat treatment was carried out to improve the quality of the LTCVD oxide in various conditions. Interface state density, flatband voltage, and effective oxide charge were decreased with the heat treatment. The heat treatment also greatly improved charge trapping characteristics against electron injection." @default.
- W1969131306 created "2016-06-24" @default.
- W1969131306 creator A5026616959 @default.
- W1969131306 creator A5083236186 @default.
- W1969131306 date "2002-01-01" @default.
- W1969131306 modified "2023-09-24" @default.
- W1969131306 title "Characterization of annealing effects of low temperature chemical vapor deposition oxide films as application of 4H-SiC metal–oxide–semiconductor devices" @default.
- W1969131306 cites W1978446612 @default.
- W1969131306 cites W1986798342 @default.
- W1969131306 cites W1995375886 @default.
- W1969131306 cites W2030239170 @default.
- W1969131306 cites W2043961227 @default.
- W1969131306 cites W2045110553 @default.
- W1969131306 cites W2076122638 @default.
- W1969131306 cites W2076640651 @default.
- W1969131306 cites W2084208525 @default.
- W1969131306 cites W2089531636 @default.
- W1969131306 cites W2100147136 @default.
- W1969131306 cites W2107761880 @default.
- W1969131306 cites W2119217122 @default.
- W1969131306 cites W2127078064 @default.
- W1969131306 cites W2129888513 @default.
- W1969131306 cites W2147928622 @default.
- W1969131306 cites W2160286674 @default.
- W1969131306 doi "https://doi.org/10.1116/1.1426365" @default.
- W1969131306 hasPublicationYear "2002" @default.
- W1969131306 type Work @default.
- W1969131306 sameAs 1969131306 @default.
- W1969131306 citedByCount "7" @default.
- W1969131306 countsByYear W19691313062012 @default.
- W1969131306 countsByYear W19691313062018 @default.
- W1969131306 crossrefType "journal-article" @default.
- W1969131306 hasAuthorship W1969131306A5026616959 @default.
- W1969131306 hasAuthorship W1969131306A5083236186 @default.
- W1969131306 hasConcept C113196181 @default.
- W1969131306 hasConcept C127413603 @default.
- W1969131306 hasConcept C185592680 @default.
- W1969131306 hasConcept C18903297 @default.
- W1969131306 hasConcept C191897082 @default.
- W1969131306 hasConcept C192562407 @default.
- W1969131306 hasConcept C2777855556 @default.
- W1969131306 hasConcept C2777924906 @default.
- W1969131306 hasConcept C2779851234 @default.
- W1969131306 hasConcept C42360764 @default.
- W1969131306 hasConcept C43617362 @default.
- W1969131306 hasConcept C49040817 @default.
- W1969131306 hasConcept C544153396 @default.
- W1969131306 hasConcept C57410435 @default.
- W1969131306 hasConcept C86803240 @default.
- W1969131306 hasConceptScore W1969131306C113196181 @default.
- W1969131306 hasConceptScore W1969131306C127413603 @default.
- W1969131306 hasConceptScore W1969131306C185592680 @default.
- W1969131306 hasConceptScore W1969131306C18903297 @default.
- W1969131306 hasConceptScore W1969131306C191897082 @default.
- W1969131306 hasConceptScore W1969131306C192562407 @default.
- W1969131306 hasConceptScore W1969131306C2777855556 @default.
- W1969131306 hasConceptScore W1969131306C2777924906 @default.
- W1969131306 hasConceptScore W1969131306C2779851234 @default.
- W1969131306 hasConceptScore W1969131306C42360764 @default.
- W1969131306 hasConceptScore W1969131306C43617362 @default.
- W1969131306 hasConceptScore W1969131306C49040817 @default.
- W1969131306 hasConceptScore W1969131306C544153396 @default.
- W1969131306 hasConceptScore W1969131306C57410435 @default.
- W1969131306 hasConceptScore W1969131306C86803240 @default.
- W1969131306 hasIssue "1" @default.
- W1969131306 hasLocation W19691313061 @default.
- W1969131306 hasOpenAccess W1969131306 @default.
- W1969131306 hasPrimaryLocation W19691313061 @default.
- W1969131306 hasRelatedWork W1532252538 @default.
- W1969131306 hasRelatedWork W1986979180 @default.
- W1969131306 hasRelatedWork W2014800410 @default.
- W1969131306 hasRelatedWork W2066206832 @default.
- W1969131306 hasRelatedWork W2083173886 @default.
- W1969131306 hasRelatedWork W2347531304 @default.
- W1969131306 hasRelatedWork W2552423211 @default.
- W1969131306 hasRelatedWork W2576037447 @default.
- W1969131306 hasRelatedWork W3196600710 @default.
- W1969131306 hasRelatedWork W4205510562 @default.
- W1969131306 hasVolume "20" @default.
- W1969131306 isParatext "false" @default.
- W1969131306 isRetracted "false" @default.
- W1969131306 magId "1969131306" @default.
- W1969131306 workType "article" @default.