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- W1969135328 abstract "A X-ray sensor based on pixelated CsI:Tl scintillation directly deposited on 6 ×6 P+/N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>well</sub> /P <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>sub</sub> photodiode arrays was proposed in this paper. The photodiode arrays fabricated through high temperature diffusion and photolithography technology has sensitivity about 10nA/lux under visible light and leak current about 1.2nA. The pixelation of scintillation was achieved by on-chip netlike SU-8 photoresist. The SU-8 photoresist is 81.6um in height and 25um in width." @default.
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- W1969135328 date "2012-10-01" @default.
- W1969135328 modified "2023-09-26" @default.
- W1969135328 title "X-ray sensor based on pixelated scintillation film on photodiode arrays" @default.
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- W1969135328 doi "https://doi.org/10.1109/icsict.2012.6467847" @default.
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