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- W1969194782 endingPage "34" @default.
- W1969194782 startingPage "29" @default.
- W1969194782 abstract "During post-oxidation annealing of Si-SiO2 structures in inert ambients at elevated temperatures, an interfacial reaction occurs in which β-SiC is thermally oxidized at a Si-SiO2 interface. Precipitates of β-SiC are identified at the interface after adding molecular SiO to the anneal ambient. When SiO concentrations are reduced, oxidation occurs at SiC impurity sites. The reaction is detected from voids that form in the oxide film as SiO2 and interfacial β-SiC are consumed.. The annealing studies indicate that interfacial carbon impurities are oxidizable and will react in parallel with Si during thin SiO2 growth in O2. The role of carbon contamination during oxidation is reviewed with emphasis on those factors that affect accumulation and oxidation of SiC at the interface." @default.
- W1969194782 created "2016-06-24" @default.
- W1969194782 creator A5082432484 @default.
- W1969194782 date "1993-08-01" @default.
- W1969194782 modified "2023-10-14" @default.
- W1969194782 title "Carbon impurities at a Si-SiO2 interface" @default.
- W1969194782 cites W1671323197 @default.
- W1969194782 cites W1985926850 @default.
- W1969194782 cites W1988665338 @default.
- W1969194782 cites W1998685414 @default.
- W1969194782 cites W2035637289 @default.
- W1969194782 cites W2038582708 @default.
- W1969194782 cites W2064295255 @default.
- W1969194782 cites W2086155010 @default.
- W1969194782 cites W2090791516 @default.
- W1969194782 cites W2110902847 @default.
- W1969194782 cites W2119095356 @default.
- W1969194782 cites W2135055022 @default.
- W1969194782 cites W2146917473 @default.
- W1969194782 cites W2159381868 @default.
- W1969194782 cites W4255385742 @default.
- W1969194782 cites W4375931966 @default.
- W1969194782 doi "https://doi.org/10.1016/0167-9317(93)90124-n" @default.
- W1969194782 hasPublicationYear "1993" @default.
- W1969194782 type Work @default.
- W1969194782 sameAs 1969194782 @default.
- W1969194782 citedByCount "10" @default.
- W1969194782 countsByYear W19691947822014 @default.
- W1969194782 crossrefType "journal-article" @default.
- W1969194782 hasAuthorship W1969194782A5082432484 @default.
- W1969194782 hasConcept C104779481 @default.
- W1969194782 hasConcept C127413603 @default.
- W1969194782 hasConcept C140205800 @default.
- W1969194782 hasConcept C154256306 @default.
- W1969194782 hasConcept C159985019 @default.
- W1969194782 hasConcept C178790620 @default.
- W1969194782 hasConcept C185592680 @default.
- W1969194782 hasConcept C191897082 @default.
- W1969194782 hasConcept C192562407 @default.
- W1969194782 hasConcept C2777855556 @default.
- W1969194782 hasConcept C2779851234 @default.
- W1969194782 hasConcept C42360764 @default.
- W1969194782 hasConcept C71987851 @default.
- W1969194782 hasConceptScore W1969194782C104779481 @default.
- W1969194782 hasConceptScore W1969194782C127413603 @default.
- W1969194782 hasConceptScore W1969194782C140205800 @default.
- W1969194782 hasConceptScore W1969194782C154256306 @default.
- W1969194782 hasConceptScore W1969194782C159985019 @default.
- W1969194782 hasConceptScore W1969194782C178790620 @default.
- W1969194782 hasConceptScore W1969194782C185592680 @default.
- W1969194782 hasConceptScore W1969194782C191897082 @default.
- W1969194782 hasConceptScore W1969194782C192562407 @default.
- W1969194782 hasConceptScore W1969194782C2777855556 @default.
- W1969194782 hasConceptScore W1969194782C2779851234 @default.
- W1969194782 hasConceptScore W1969194782C42360764 @default.
- W1969194782 hasConceptScore W1969194782C71987851 @default.
- W1969194782 hasIssue "1-4" @default.
- W1969194782 hasLocation W19691947821 @default.
- W1969194782 hasOpenAccess W1969194782 @default.
- W1969194782 hasPrimaryLocation W19691947821 @default.
- W1969194782 hasRelatedWork W1969194782 @default.
- W1969194782 hasRelatedWork W1969340488 @default.
- W1969194782 hasRelatedWork W2005777149 @default.
- W1969194782 hasRelatedWork W2018222268 @default.
- W1969194782 hasRelatedWork W2078598526 @default.
- W1969194782 hasRelatedWork W2328235886 @default.
- W1969194782 hasRelatedWork W2558617580 @default.
- W1969194782 hasRelatedWork W3207734879 @default.
- W1969194782 hasRelatedWork W4205510562 @default.
- W1969194782 hasRelatedWork W4254682018 @default.
- W1969194782 hasVolume "22" @default.
- W1969194782 isParatext "false" @default.
- W1969194782 isRetracted "false" @default.
- W1969194782 magId "1969194782" @default.
- W1969194782 workType "article" @default.