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- W1969293460 abstract "The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications." @default.
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- W1969293460 date "2012-10-15" @default.
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- W1969293460 title "MEMS deformable mirrors: technology and applications" @default.
- W1969293460 doi "https://doi.org/10.1117/12.925268" @default.
- W1969293460 hasPublicationYear "2012" @default.
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