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- W1969322495 endingPage "3166" @default.
- W1969322495 startingPage "3162" @default.
- W1969322495 abstract "A novel three-component chemically amplified positive tone resist system for EB lithography composed of a novolak resin, an acid generator, and a newly synthesized dissolution inhibitor, is investigated. Four 1-(3H)-isobenzofuranone derivatives containing a tert-butoxycarbonyl (t-Boc) group and a lactone ring have been synthesized as dissolution inhibitors. The t-Boc group of these dissolution inhibitors was effectively decomposed by an acid catalyzed thermal reaction. In addition to this decomposition, the lactone ring of the decomposed product was spontaneously cleft in an aqueous base to generate carboxylic acid. Among these synthesized substances, only the t-Boc derivative of o-cresolphtalein showed an excellent solubility in 1-acetoxy-2-ethoxyethane" @default.
- W1969322495 created "2016-06-24" @default.
- W1969322495 creator A5004814847 @default.
- W1969322495 creator A5019687677 @default.
- W1969322495 creator A5039652877 @default.
- W1969322495 creator A5062132147 @default.
- W1969322495 creator A5062415158 @default.
- W1969322495 creator A5088045011 @default.
- W1969322495 date "1994-11-01" @default.
- W1969322495 modified "2023-10-17" @default.
- W1969322495 title "Chemically Amplified Resist Using Self‐Solubility Acceleration Effect" @default.
- W1969322495 doi "https://doi.org/10.1149/1.2059295" @default.
- W1969322495 hasPublicationYear "1994" @default.
- W1969322495 type Work @default.
- W1969322495 sameAs 1969322495 @default.
- W1969322495 citedByCount "2" @default.
- W1969322495 crossrefType "journal-article" @default.
- W1969322495 hasAuthorship W1969322495A5004814847 @default.
- W1969322495 hasAuthorship W1969322495A5019687677 @default.
- W1969322495 hasAuthorship W1969322495A5039652877 @default.
- W1969322495 hasAuthorship W1969322495A5062132147 @default.
- W1969322495 hasAuthorship W1969322495A5062415158 @default.
- W1969322495 hasAuthorship W1969322495A5088045011 @default.
- W1969322495 hasConcept C117896860 @default.
- W1969322495 hasConcept C121332964 @default.
- W1969322495 hasConcept C147789679 @default.
- W1969322495 hasConcept C155574463 @default.
- W1969322495 hasConcept C171250308 @default.
- W1969322495 hasConcept C185592680 @default.
- W1969322495 hasConcept C192562407 @default.
- W1969322495 hasConcept C2779227376 @default.
- W1969322495 hasConcept C53524968 @default.
- W1969322495 hasConcept C74650414 @default.
- W1969322495 hasConceptScore W1969322495C117896860 @default.
- W1969322495 hasConceptScore W1969322495C121332964 @default.
- W1969322495 hasConceptScore W1969322495C147789679 @default.
- W1969322495 hasConceptScore W1969322495C155574463 @default.
- W1969322495 hasConceptScore W1969322495C171250308 @default.
- W1969322495 hasConceptScore W1969322495C185592680 @default.
- W1969322495 hasConceptScore W1969322495C192562407 @default.
- W1969322495 hasConceptScore W1969322495C2779227376 @default.
- W1969322495 hasConceptScore W1969322495C53524968 @default.
- W1969322495 hasConceptScore W1969322495C74650414 @default.
- W1969322495 hasIssue "11" @default.
- W1969322495 hasLocation W19693224951 @default.
- W1969322495 hasOpenAccess W1969322495 @default.
- W1969322495 hasPrimaryLocation W19693224951 @default.
- W1969322495 hasRelatedWork W1984143049 @default.
- W1969322495 hasRelatedWork W1992658757 @default.
- W1969322495 hasRelatedWork W2018278028 @default.
- W1969322495 hasRelatedWork W2029327551 @default.
- W1969322495 hasRelatedWork W2073044440 @default.
- W1969322495 hasRelatedWork W2088899554 @default.
- W1969322495 hasRelatedWork W2095155031 @default.
- W1969322495 hasRelatedWork W2376934778 @default.
- W1969322495 hasRelatedWork W2557777957 @default.
- W1969322495 hasRelatedWork W2899084033 @default.
- W1969322495 hasVolume "141" @default.
- W1969322495 isParatext "false" @default.
- W1969322495 isRetracted "false" @default.
- W1969322495 magId "1969322495" @default.
- W1969322495 workType "article" @default.