FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969341202> ?p ?o ?g. }

• W1969341202 endingPage "2049" @default.
• W1969341202 startingPage "2045" @default.
• W1969341202 abstract "Indium zinc oxide (IZO) films were deposited as a function of the deposition temperature using a sintered indium zinc oxide target (In2O3:ZnO = 90:10 wt.%) by direct current (DC) magnetron reactive sputtering method. The influence of the substrate temperature on the microstructure, surface roughness and electrical properties was studied. With increasing the temperature up to 200 °C, the characteristic properties of amorphous IZO films were improved and the specific resistivity was about 3.4 × 10− 4 Ω cm. Change of structural properties according to the deposition temperature was also observed with X-ray diffraction patterns, transmission electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. IZO films deposited above 300 °C showed polycrystalline phases evolved on the amorphous IZO layer. Very flat surface roughness could be obtained at lower than 200 °C of the substrate temperature, while surface roughness of the films was increased due to the formation of grains over 300 °C. Consequently, high quality IZO films could be prepared by DC magnetron sputtering with O2/Ar of 0.03 and deposition temperature in range of 150–200 °C; a specific resistivity of 3.4 × 10− 4 Ω cm, and the values of peak to valley roughness and root-mean-square roughness are less than 4 nm and 0.5 nm, respectively." @default.
• W1969341202 created "2016-06-24" @default.
• W1969341202 creator A5006777241 @default.
• W1969341202 creator A5036824889 @default.
• W1969341202 creator A5072037537 @default.
• W1969341202 creator A5078891698 @default.
• W1969341202 creator A5083648197 @default.
• W1969341202 date "2008-02-01" @default.
• W1969341202 modified "2023-10-08" @default.
• W1969341202 title "Temperature dependence of the microstructure and resistivity of indium zinc oxide films deposited by direct current magnetron reactive sputtering" @default.
• W1969341202 cites W1966744717 @default.
• W1969341202 cites W1983587886 @default.
• W1969341202 cites W1997820861 @default.
• W1969341202 cites W1999607479 @default.
• W1969341202 cites W2000929128 @default.
• W1969341202 cites W2004907704 @default.
• W1969341202 cites W2005979354 @default.
• W1969341202 cites W2015560929 @default.
• W1969341202 cites W2035975957 @default.
• W1969341202 cites W2046757329 @default.
• W1969341202 cites W2055061721 @default.
• W1969341202 cites W2071587355 @default.
• W1969341202 cites W2075273154 @default.
• W1969341202 cites W2077188122 @default.
• W1969341202 cites W2078562056 @default.
• W1969341202 cites W2083916632 @default.
• W1969341202 cites W2091172798 @default.
• W1969341202 cites W2105996903 @default.
• W1969341202 cites W2167730479 @default.
• W1969341202 cites W2512461148 @default.
• W1969341202 doi "https://doi.org/10.1016/j.tsf.2007.07.181" @default.
• W1969341202 hasPublicationYear "2008" @default.
• W1969341202 type Work @default.
• W1969341202 sameAs 1969341202 @default.
• W1969341202 citedByCount "27" @default.
• W1969341202 countsByYear W19693412022012 @default.
• W1969341202 countsByYear W19693412022013 @default.
• W1969341202 countsByYear W19693412022014 @default.
• W1969341202 countsByYear W19693412022015 @default.
• W1969341202 countsByYear W19693412022017 @default.
• W1969341202 countsByYear W19693412022018 @default.
• W1969341202 countsByYear W19693412022019 @default.
• W1969341202 countsByYear W19693412022020 @default.
• W1969341202 countsByYear W19693412022021 @default.
• W1969341202 countsByYear W19693412022022 @default.
• W1969341202 crossrefType "journal-article" @default.
• W1969341202 hasAuthorship W1969341202A5006777241 @default.
• W1969341202 hasAuthorship W1969341202A5036824889 @default.
• W1969341202 hasAuthorship W1969341202A5072037537 @default.
• W1969341202 hasAuthorship W1969341202A5078891698 @default.
• W1969341202 hasAuthorship W1969341202A5083648197 @default.
• W1969341202 hasConcept C107365816 @default.
• W1969341202 hasConcept C111368507 @default.
• W1969341202 hasConcept C113196181 @default.
• W1969341202 hasConcept C119599485 @default.
• W1969341202 hasConcept C123408415 @default.
• W1969341202 hasConcept C127313418 @default.
• W1969341202 hasConcept C127413603 @default.
• W1969341202 hasConcept C159985019 @default.
• W1969341202 hasConcept C171250308 @default.
• W1969341202 hasConcept C175708663 @default.
• W1969341202 hasConcept C185592680 @default.
• W1969341202 hasConcept C19067145 @default.
• W1969341202 hasConcept C191897082 @default.
• W1969341202 hasConcept C192562407 @default.
• W1969341202 hasConcept C22423302 @default.
• W1969341202 hasConcept C2777289219 @default.
• W1969341202 hasConcept C2779851234 @default.
• W1969341202 hasConcept C42360764 @default.
• W1969341202 hasConcept C43617362 @default.
• W1969341202 hasConcept C543292547 @default.
• W1969341202 hasConcept C56052488 @default.
• W1969341202 hasConcept C61427134 @default.
• W1969341202 hasConcept C69990965 @default.
• W1969341202 hasConcept C8010536 @default.
• W1969341202 hasConcept C87976508 @default.
• W1969341202 hasConceptScore W1969341202C107365816 @default.
• W1969341202 hasConceptScore W1969341202C111368507 @default.
• W1969341202 hasConceptScore W1969341202C113196181 @default.
• W1969341202 hasConceptScore W1969341202C119599485 @default.
• W1969341202 hasConceptScore W1969341202C123408415 @default.
• W1969341202 hasConceptScore W1969341202C127313418 @default.
• W1969341202 hasConceptScore W1969341202C127413603 @default.
• W1969341202 hasConceptScore W1969341202C159985019 @default.
• W1969341202 hasConceptScore W1969341202C171250308 @default.
• W1969341202 hasConceptScore W1969341202C175708663 @default.
• W1969341202 hasConceptScore W1969341202C185592680 @default.
• W1969341202 hasConceptScore W1969341202C19067145 @default.
• W1969341202 hasConceptScore W1969341202C191897082 @default.
• W1969341202 hasConceptScore W1969341202C192562407 @default.
• W1969341202 hasConceptScore W1969341202C22423302 @default.
• W1969341202 hasConceptScore W1969341202C2777289219 @default.
• W1969341202 hasConceptScore W1969341202C2779851234 @default.
• W1969341202 hasConceptScore W1969341202C42360764 @default.
• W1969341202 hasConceptScore W1969341202C43617362 @default.
• W1969341202 hasConceptScore W1969341202C543292547 @default.
• W1969341202 hasConceptScore W1969341202C56052488 @default.
• W1969341202 hasConceptScore W1969341202C61427134 @default.

• next