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- W1969393584 abstract "The characteristics of plasma parameters and their spatial structures in a parallel-plates RF discharge in argon modified by the injection of small carbon particles have been investigated. A larger peak-to-peak fluctuation of space potential in the bulk plasma region was observed by an emissive probe measurement together with a decrease in the self-bias voltage. The electron energy distribution function in the plasma bulk as measured by an energy analyser also showed the presence of a higher energy tail. The enhancement of an argon atomic line emission in the midgap was consistent with the above results, showing the transition of the discharge mode from the gamma to alpha regimes. Spatial and temporal behaviours of particle density and size were measured by a newly proposed ellipsometric detection method of the laser Mie scattered light. Slow shift of the peak position of density and size distributions towards the sheath edge of the powered electrode was observed." @default.
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- W1969393584 date "1994-08-01" @default.
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- W1969393584 title "Spectroscopic and probe measurements of structures in a parallel-plates RF discharge with particles" @default.
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- W1969393584 doi "https://doi.org/10.1088/0963-0252/3/3/012" @default.
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