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• W1969397790 endingPage "198" @default.
• W1969397790 startingPage "193" @default.
• W1969397790 abstract "Chemical vapour deposited (CVD) low-k films using tri-methyl-silane (3MS) and tetra-methyl cyclo-tetra-siloxanes (TMCTS) precursors were studied. A 4-point bend test (4PBT) was performed to assess the adhesion property of the low-k films to Si substrates and the results were compared with that of simpler method, nanoscratch test (NST), as a quality control tool despite its drawbacks. Adhesion energy, Gc, of the low-k/Si interface as measured by 4PBT and critical scratch load, Pc, as obtained by NST display a linear relationship with hardness and modulus of the low-k film. The lowering of Gc as the hardness of the film decreases can be explained by the effects of the C introduction into the SiO networks found in these films. Lower carbon content for higher hardness films is thought to cause them to be more “silica-like”, and thus, exhibit better adhesion with the Si substrate. Two failure modes were observed for specimens under 4PBT. On one hand, films with low hardness (<5 GPa) exhibit low Gc (<10 J/m2) with an adhesive separation of low-k from the Si substrate. On the other hand, films of high hardness (>5 GPa) display interfacial energies in excess of 10 J/m2 with delamination of epoxy from the Si substrate, thus, indicating excellent adhesion between the low-k films and Si substrate. For the low hardness films, good correlation exists between Pc and Gc. However, the two data points of the high hardness films that gave the two highest Pc and Gc values do not lie on the correlation line drawn for the low hardness film data points due to different factors governing the failure in both tests and a change in the 4PBT failure mechanism." @default.
• W1969397790 created "2016-06-24" @default.
• W1969397790 creator A5007762339 @default.
• W1969397790 creator A5011221355 @default.
• W1969397790 creator A5015642735 @default.
• W1969397790 creator A5020248419 @default.
• W1969397790 creator A5037076208 @default.
• W1969397790 creator A5053909777 @default.
• W1969397790 creator A5059674663 @default.
• W1969397790 creator A5068663851 @default.
• W1969397790 date "2005-08-01" @default.
• W1969397790 modified "2023-10-16" @default.
• W1969397790 title "Adhesion study of low-k/Si system using 4-point bending and nanoscratch test" @default.
• W1969397790 cites W1898734385 @default.
• W1969397790 cites W1972499601 @default.
• W1969397790 cites W1974593156 @default.
• W1969397790 cites W2003978230 @default.
• W1969397790 cites W2009221461 @default.
• W1969397790 cites W2022620381 @default.
• W1969397790 cites W2025445865 @default.
• W1969397790 cites W2028375477 @default.
• W1969397790 cites W2030470510 @default.
• W1969397790 cites W2036455153 @default.
• W1969397790 cites W2066344144 @default.
• W1969397790 cites W2071941287 @default.
• W1969397790 cites W2083807833 @default.
• W1969397790 cites W2146051691 @default.
• W1969397790 doi "https://doi.org/10.1016/j.mseb.2005.03.030" @default.
• W1969397790 hasPublicationYear "2005" @default.
• W1969397790 type Work @default.
• W1969397790 sameAs 1969397790 @default.
• W1969397790 citedByCount "39" @default.
• W1969397790 countsByYear W19693977902012 @default.
• W1969397790 countsByYear W19693977902013 @default.
• W1969397790 countsByYear W19693977902014 @default.
• W1969397790 countsByYear W19693977902015 @default.
• W1969397790 countsByYear W19693977902016 @default.
• W1969397790 countsByYear W19693977902017 @default.
• W1969397790 countsByYear W19693977902019 @default.
• W1969397790 countsByYear W19693977902020 @default.
• W1969397790 countsByYear W19693977902021 @default.
• W1969397790 crossrefType "journal-article" @default.
• W1969397790 hasAuthorship W1969397790A5007762339 @default.
• W1969397790 hasAuthorship W1969397790A5011221355 @default.
• W1969397790 hasAuthorship W1969397790A5015642735 @default.
• W1969397790 hasAuthorship W1969397790A5020248419 @default.
• W1969397790 hasAuthorship W1969397790A5037076208 @default.
• W1969397790 hasAuthorship W1969397790A5053909777 @default.
• W1969397790 hasAuthorship W1969397790A5059674663 @default.
• W1969397790 hasAuthorship W1969397790A5068663851 @default.
• W1969397790 hasConcept C111368507 @default.
• W1969397790 hasConcept C127313418 @default.
• W1969397790 hasConcept C133392424 @default.
• W1969397790 hasConcept C151730666 @default.
• W1969397790 hasConcept C159985019 @default.
• W1969397790 hasConcept C165720898 @default.
• W1969397790 hasConcept C171250308 @default.
• W1969397790 hasConcept C19067145 @default.
• W1969397790 hasConcept C192562407 @default.
• W1969397790 hasConcept C2777289219 @default.
• W1969397790 hasConcept C2778024649 @default.
• W1969397790 hasConcept C2779227376 @default.
• W1969397790 hasConcept C30239060 @default.
• W1969397790 hasConcept C58097730 @default.
• W1969397790 hasConcept C68928338 @default.
• W1969397790 hasConcept C77928131 @default.
• W1969397790 hasConcept C84416704 @default.
• W1969397790 hasConcept C86803240 @default.
• W1969397790 hasConcept C87976508 @default.
• W1969397790 hasConceptScore W1969397790C111368507 @default.
• W1969397790 hasConceptScore W1969397790C127313418 @default.
• W1969397790 hasConceptScore W1969397790C133392424 @default.
• W1969397790 hasConceptScore W1969397790C151730666 @default.
• W1969397790 hasConceptScore W1969397790C159985019 @default.
• W1969397790 hasConceptScore W1969397790C165720898 @default.
• W1969397790 hasConceptScore W1969397790C171250308 @default.
• W1969397790 hasConceptScore W1969397790C19067145 @default.
• W1969397790 hasConceptScore W1969397790C192562407 @default.
• W1969397790 hasConceptScore W1969397790C2777289219 @default.
• W1969397790 hasConceptScore W1969397790C2778024649 @default.
• W1969397790 hasConceptScore W1969397790C2779227376 @default.
• W1969397790 hasConceptScore W1969397790C30239060 @default.
• W1969397790 hasConceptScore W1969397790C58097730 @default.
• W1969397790 hasConceptScore W1969397790C68928338 @default.
• W1969397790 hasConceptScore W1969397790C77928131 @default.
• W1969397790 hasConceptScore W1969397790C84416704 @default.
• W1969397790 hasConceptScore W1969397790C86803240 @default.
• W1969397790 hasConceptScore W1969397790C87976508 @default.
• W1969397790 hasIssue "3" @default.
• W1969397790 hasLocation W19693977901 @default.
• W1969397790 hasOpenAccess W1969397790 @default.
• W1969397790 hasPrimaryLocation W19693977901 @default.
• W1969397790 hasRelatedWork W1039848210 @default.
• W1969397790 hasRelatedWork W1963684115 @default.
• W1969397790 hasRelatedWork W2062276134 @default.
• W1969397790 hasRelatedWork W2295180946 @default.
• W1969397790 hasRelatedWork W2366970374 @default.
• W1969397790 hasRelatedWork W252553329 @default.

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