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- W1969495576 abstract "Texturing of multicrystalline silicon solar cells by reactive ion etching (RIE) is demonstrated as an attractive solution for lowering of reflectance. A suitable sequence of processes is developed to exploit the advantage of RIE in combination with “natural lithography” based on colloidal masks. A homogeneous particle coverage on 4 in. monocrystalline wafers and on 100×100 mm 2 multicrystalline wafers (Baysix) has been achieved. Finally, texture is obtained by RIE patterning. Data of optical properties are presented. A significant lowering of the reflection of textured wafers compared to untexture is achieved for all states of solar cell production." @default.
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- W1969495576 date "2003-03-01" @default.
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- W1969495576 title "Texturisation of multicrystalline silicon wafers for solar cells by reactive ion etching through colloidal masks" @default.
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- W1969495576 doi "https://doi.org/10.1016/s0927-0248(02)00214-3" @default.
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