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- W1969518251 endingPage "60" @default.
- W1969518251 startingPage "57" @default.
- W1969518251 abstract "Ni metal-induced lateral crystallization (Ni-MILC) of amorphous Si0.6Ge0.4 thin films has been investigated by means of scanning electron microscopy and transmission electron microscopy. A pattern of Ni about 5 nm thick was fabricated to cover selective areas of the a-Si0.6Ge0.4 film. Subsequently, the thin film was annealed at 550 °C for various lengths of time. In the area covered with Ni, Ni atoms diffuse into the SiGe film and react with Ge to produce precipitates of Ni2Ge, leaving amorphous Si. In the area outside of the Ni-covered one, on the other hand, crystallization occurs to form aggregates of small Si0.6Ge0.4 grains without Ni incorporation. In the MILC process, the kind of Ni compound phase changes with the amount of diffusing Ni and the lateral crystallization should be induced by the formation of NiSi2." @default.
- W1969518251 created "2016-06-24" @default.
- W1969518251 creator A5017871804 @default.
- W1969518251 creator A5019951363 @default.
- W1969518251 creator A5020489199 @default.
- W1969518251 creator A5048381985 @default.
- W1969518251 creator A5056595282 @default.
- W1969518251 creator A5057025815 @default.
- W1969518251 creator A5080092223 @default.
- W1969518251 creator A5081429604 @default.
- W1969518251 date "2006-06-01" @default.
- W1969518251 modified "2023-10-16" @default.
- W1969518251 title "Characterization of metal-induced lateral crystallization of amorphous SiGe on insulating film" @default.
- W1969518251 cites W1513580726 @default.
- W1969518251 cites W1619303756 @default.
- W1969518251 cites W1964833164 @default.
- W1969518251 cites W1965215593 @default.
- W1969518251 cites W1979975297 @default.
- W1969518251 cites W2008255672 @default.
- W1969518251 cites W2020055346 @default.
- W1969518251 cites W2028714094 @default.
- W1969518251 cites W2040825527 @default.
- W1969518251 cites W2042312869 @default.
- W1969518251 cites W2052107342 @default.
- W1969518251 cites W2053894803 @default.
- W1969518251 cites W2070821063 @default.
- W1969518251 cites W2077840233 @default.
- W1969518251 cites W2089312630 @default.
- W1969518251 cites W2107706977 @default.
- W1969518251 doi "https://doi.org/10.1016/j.tsf.2005.06.102" @default.
- W1969518251 hasPublicationYear "2006" @default.
- W1969518251 type Work @default.
- W1969518251 sameAs 1969518251 @default.
- W1969518251 citedByCount "6" @default.
- W1969518251 countsByYear W19695182512015 @default.
- W1969518251 crossrefType "journal-article" @default.
- W1969518251 hasAuthorship W1969518251A5017871804 @default.
- W1969518251 hasAuthorship W1969518251A5019951363 @default.
- W1969518251 hasAuthorship W1969518251A5020489199 @default.
- W1969518251 hasAuthorship W1969518251A5048381985 @default.
- W1969518251 hasAuthorship W1969518251A5056595282 @default.
- W1969518251 hasAuthorship W1969518251A5057025815 @default.
- W1969518251 hasAuthorship W1969518251A5080092223 @default.
- W1969518251 hasAuthorship W1969518251A5081429604 @default.
- W1969518251 hasConcept C123266363 @default.
- W1969518251 hasConcept C127413603 @default.
- W1969518251 hasConcept C146088050 @default.
- W1969518251 hasConcept C159985019 @default.
- W1969518251 hasConcept C171250308 @default.
- W1969518251 hasConcept C178790620 @default.
- W1969518251 hasConcept C185592680 @default.
- W1969518251 hasConcept C19067145 @default.
- W1969518251 hasConcept C192562407 @default.
- W1969518251 hasConcept C203036418 @default.
- W1969518251 hasConcept C26771246 @default.
- W1969518251 hasConcept C2780841128 @default.
- W1969518251 hasConcept C42360764 @default.
- W1969518251 hasConcept C44280652 @default.
- W1969518251 hasConcept C56052488 @default.
- W1969518251 hasConcept C8010536 @default.
- W1969518251 hasConceptScore W1969518251C123266363 @default.
- W1969518251 hasConceptScore W1969518251C127413603 @default.
- W1969518251 hasConceptScore W1969518251C146088050 @default.
- W1969518251 hasConceptScore W1969518251C159985019 @default.
- W1969518251 hasConceptScore W1969518251C171250308 @default.
- W1969518251 hasConceptScore W1969518251C178790620 @default.
- W1969518251 hasConceptScore W1969518251C185592680 @default.
- W1969518251 hasConceptScore W1969518251C19067145 @default.
- W1969518251 hasConceptScore W1969518251C192562407 @default.
- W1969518251 hasConceptScore W1969518251C203036418 @default.
- W1969518251 hasConceptScore W1969518251C26771246 @default.
- W1969518251 hasConceptScore W1969518251C2780841128 @default.
- W1969518251 hasConceptScore W1969518251C42360764 @default.
- W1969518251 hasConceptScore W1969518251C44280652 @default.
- W1969518251 hasConceptScore W1969518251C56052488 @default.
- W1969518251 hasConceptScore W1969518251C8010536 @default.
- W1969518251 hasIssue "1-2" @default.
- W1969518251 hasLocation W19695182511 @default.
- W1969518251 hasOpenAccess W1969518251 @default.
- W1969518251 hasPrimaryLocation W19695182511 @default.
- W1969518251 hasRelatedWork W1969518251 @default.
- W1969518251 hasRelatedWork W2006680646 @default.
- W1969518251 hasRelatedWork W2018474344 @default.
- W1969518251 hasRelatedWork W2027434926 @default.
- W1969518251 hasRelatedWork W2031666815 @default.
- W1969518251 hasRelatedWork W2072597295 @default.
- W1969518251 hasRelatedWork W2076477916 @default.
- W1969518251 hasRelatedWork W2611495073 @default.
- W1969518251 hasRelatedWork W2906693923 @default.
- W1969518251 hasRelatedWork W2913206057 @default.
- W1969518251 hasVolume "508" @default.
- W1969518251 isParatext "false" @default.
- W1969518251 isRetracted "false" @default.
- W1969518251 magId "1969518251" @default.
- W1969518251 workType "article" @default.