Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969583458> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1969583458 endingPage "D80" @default.
- W1969583458 startingPage "D80" @default.
- W1969583458 abstract "A photoetching method with -fluoropyridinium salts is proposed in this study. Si is etched by applying -fluoropyridinium salts to its surface and exposing the surface to light. The etched surface that uses liquid -fluoropyridinium salts is smoother than when solid -fluoropyridinium salts are used. The etching depth increases with exposure time. H-terminated hydrophobic Si is easier to etch than OH-terminated hydrophilic Si. is produced by photoetching. This suggests that -fluoropiridinium salts receive excited electrons from Si and supply Si with active F species." @default.
- W1969583458 created "2016-06-24" @default.
- W1969583458 creator A5006514057 @default.
- W1969583458 creator A5017950060 @default.
- W1969583458 creator A5024352084 @default.
- W1969583458 creator A5028624795 @default.
- W1969583458 creator A5036984489 @default.
- W1969583458 creator A5043995298 @default.
- W1969583458 creator A5048428374 @default.
- W1969583458 creator A5056824357 @default.
- W1969583458 creator A5059693508 @default.
- W1969583458 date "2010-01-01" @default.
- W1969583458 modified "2023-09-26" @default.
- W1969583458 title "Photoetching of Silicon by N-Fluoropyridinium Salt" @default.
- W1969583458 cites W2080709461 @default.
- W1969583458 cites W2952881182 @default.
- W1969583458 doi "https://doi.org/10.1149/1.3481770" @default.
- W1969583458 hasPublicationYear "2010" @default.
- W1969583458 type Work @default.
- W1969583458 sameAs 1969583458 @default.
- W1969583458 citedByCount "6" @default.
- W1969583458 countsByYear W19695834582012 @default.
- W1969583458 countsByYear W19695834582014 @default.
- W1969583458 countsByYear W19695834582016 @default.
- W1969583458 countsByYear W19695834582017 @default.
- W1969583458 crossrefType "journal-article" @default.
- W1969583458 hasAuthorship W1969583458A5006514057 @default.
- W1969583458 hasAuthorship W1969583458A5017950060 @default.
- W1969583458 hasAuthorship W1969583458A5024352084 @default.
- W1969583458 hasAuthorship W1969583458A5028624795 @default.
- W1969583458 hasAuthorship W1969583458A5036984489 @default.
- W1969583458 hasAuthorship W1969583458A5043995298 @default.
- W1969583458 hasAuthorship W1969583458A5048428374 @default.
- W1969583458 hasAuthorship W1969583458A5056824357 @default.
- W1969583458 hasAuthorship W1969583458A5059693508 @default.
- W1969583458 hasConcept C100460472 @default.
- W1969583458 hasConcept C121332964 @default.
- W1969583458 hasConcept C127413603 @default.
- W1969583458 hasConcept C171250308 @default.
- W1969583458 hasConcept C178790620 @default.
- W1969583458 hasConcept C181500209 @default.
- W1969583458 hasConcept C184779094 @default.
- W1969583458 hasConcept C185592680 @default.
- W1969583458 hasConcept C192562407 @default.
- W1969583458 hasConcept C2776371256 @default.
- W1969583458 hasConcept C2779227376 @default.
- W1969583458 hasConcept C2993921965 @default.
- W1969583458 hasConcept C42360764 @default.
- W1969583458 hasConcept C49040817 @default.
- W1969583458 hasConcept C544956773 @default.
- W1969583458 hasConcept C75473681 @default.
- W1969583458 hasConceptScore W1969583458C100460472 @default.
- W1969583458 hasConceptScore W1969583458C121332964 @default.
- W1969583458 hasConceptScore W1969583458C127413603 @default.
- W1969583458 hasConceptScore W1969583458C171250308 @default.
- W1969583458 hasConceptScore W1969583458C178790620 @default.
- W1969583458 hasConceptScore W1969583458C181500209 @default.
- W1969583458 hasConceptScore W1969583458C184779094 @default.
- W1969583458 hasConceptScore W1969583458C185592680 @default.
- W1969583458 hasConceptScore W1969583458C192562407 @default.
- W1969583458 hasConceptScore W1969583458C2776371256 @default.
- W1969583458 hasConceptScore W1969583458C2779227376 @default.
- W1969583458 hasConceptScore W1969583458C2993921965 @default.
- W1969583458 hasConceptScore W1969583458C42360764 @default.
- W1969583458 hasConceptScore W1969583458C49040817 @default.
- W1969583458 hasConceptScore W1969583458C544956773 @default.
- W1969583458 hasConceptScore W1969583458C75473681 @default.
- W1969583458 hasIssue "11" @default.
- W1969583458 hasLocation W19695834581 @default.
- W1969583458 hasOpenAccess W1969583458 @default.
- W1969583458 hasPrimaryLocation W19695834581 @default.
- W1969583458 hasRelatedWork W2018353199 @default.
- W1969583458 hasRelatedWork W2075308121 @default.
- W1969583458 hasRelatedWork W2312552982 @default.
- W1969583458 hasRelatedWork W2508204147 @default.
- W1969583458 hasRelatedWork W2514407421 @default.
- W1969583458 hasRelatedWork W2902546961 @default.
- W1969583458 hasRelatedWork W2950285858 @default.
- W1969583458 hasRelatedWork W3036157976 @default.
- W1969583458 hasRelatedWork W4247028702 @default.
- W1969583458 hasRelatedWork W1990073912 @default.
- W1969583458 hasVolume "13" @default.
- W1969583458 isParatext "false" @default.
- W1969583458 isRetracted "false" @default.
- W1969583458 magId "1969583458" @default.
- W1969583458 workType "article" @default.