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- W1969779729 abstract "Pellicles are thin transparent membranes of high optical quality that are placed on one or both sides of an IC circuit mask to protect the mask and to prevent any particulate defect falling onto the mask from affecting the printed image [1]. Pellicles have been successfully utilized in production with 1:1 scanning systems and have given measureable improvements in yield [2]." @default.
- W1969779729 created "2016-06-24" @default.
- W1969779729 creator A5086648846 @default.
- W1969779729 date "1984-06-29" @default.
- W1969779729 modified "2023-09-23" @default.
- W1969779729 title "An Analysis Of Pellicle Parameters For Step-And-Repeat Projection" @default.
- W1969779729 doi "https://doi.org/10.1117/12.941903" @default.
- W1969779729 hasPublicationYear "1984" @default.
- W1969779729 type Work @default.
- W1969779729 sameAs 1969779729 @default.
- W1969779729 citedByCount "3" @default.
- W1969779729 countsByYear W19697797292018 @default.
- W1969779729 crossrefType "proceedings-article" @default.
- W1969779729 hasAuthorship W1969779729A5086648846 @default.
- W1969779729 hasConcept C11413529 @default.
- W1969779729 hasConcept C120665830 @default.
- W1969779729 hasConcept C121332964 @default.
- W1969779729 hasConcept C134121241 @default.
- W1969779729 hasConcept C154945302 @default.
- W1969779729 hasConcept C159985019 @default.
- W1969779729 hasConcept C192562407 @default.
- W1969779729 hasConcept C2779079380 @default.
- W1969779729 hasConcept C31972630 @default.
- W1969779729 hasConcept C41008148 @default.
- W1969779729 hasConcept C57493831 @default.
- W1969779729 hasConcept C71924100 @default.
- W1969779729 hasConcept C99454951 @default.
- W1969779729 hasConceptScore W1969779729C11413529 @default.
- W1969779729 hasConceptScore W1969779729C120665830 @default.
- W1969779729 hasConceptScore W1969779729C121332964 @default.
- W1969779729 hasConceptScore W1969779729C134121241 @default.
- W1969779729 hasConceptScore W1969779729C154945302 @default.
- W1969779729 hasConceptScore W1969779729C159985019 @default.
- W1969779729 hasConceptScore W1969779729C192562407 @default.
- W1969779729 hasConceptScore W1969779729C2779079380 @default.
- W1969779729 hasConceptScore W1969779729C31972630 @default.
- W1969779729 hasConceptScore W1969779729C41008148 @default.
- W1969779729 hasConceptScore W1969779729C57493831 @default.
- W1969779729 hasConceptScore W1969779729C71924100 @default.
- W1969779729 hasConceptScore W1969779729C99454951 @default.
- W1969779729 hasLocation W19697797291 @default.
- W1969779729 hasOpenAccess W1969779729 @default.
- W1969779729 hasPrimaryLocation W19697797291 @default.
- W1969779729 hasRelatedWork W2063838338 @default.
- W1969779729 hasRelatedWork W1580661842 @default.
- W1969779729 hasRelatedWork W2246997845 @default.
- W1969779729 hasRelatedWork W2255658179 @default.
- W1969779729 hasRelatedWork W2736576288 @default.
- W1969779729 hasRelatedWork W2758080418 @default.
- W1969779729 hasRelatedWork W2774789966 @default.
- W1969779729 hasRelatedWork W2824401062 @default.
- W1969779729 hasRelatedWork W2839478093 @default.
- W1969779729 hasRelatedWork W2840360400 @default.
- W1969779729 hasRelatedWork W2854681704 @default.
- W1969779729 hasRelatedWork W2858053906 @default.
- W1969779729 hasRelatedWork W2863250593 @default.
- W1969779729 hasRelatedWork W2874916213 @default.
- W1969779729 hasRelatedWork W2877178049 @default.
- W1969779729 hasRelatedWork W2879438998 @default.
- W1969779729 hasRelatedWork W3061637718 @default.
- W1969779729 hasRelatedWork W3098409603 @default.
- W1969779729 hasRelatedWork W3151284491 @default.
- W1969779729 hasRelatedWork W934229008 @default.
- W1969779729 isParatext "false" @default.
- W1969779729 isRetracted "false" @default.
- W1969779729 magId "1969779729" @default.
- W1969779729 workType "article" @default.