Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969831569> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W1969831569 endingPage "7" @default.
- W1969831569 startingPage "2" @default.
- W1969831569 abstract "The deliberate use of H- and He-related phenomena in crystalline Si (c-Si) has at times been hampered by concerns of the mobility of these light elements and hence potential device instability. However H is inevitably present in many Si processing steps, though not necessarily in the finished device. Accordingly one could differentiate between a transient or catalytic interaction of H with c-Si, and one where H resides permanently during device operation. We have uncovered phenomena on both domains, and these involve trapping and de-trapping of H by defective regions, thermal activation of latent defects in hydrogenated c-Si, and low-temperature activation of ion implanted dopant atoms. He differs from H principally by its electrical inactivity, but plays a significant role in altering the microstructure. The strong interaction of He with vacancy clusters results in nanocavities that act as excellent gettering sites and also enable localized minority carrier lifetime control. H and He thus offer possibilities for defect and impurity engineering in Si." @default.
- W1969831569 created "2016-06-24" @default.
- W1969831569 creator A5057651898 @default.
- W1969831569 date "2005-05-01" @default.
- W1969831569 modified "2023-09-24" @default.
- W1969831569 title "Hydrogen and helium interactions in Si: phenomena obscure and not-so-obscure" @default.
- W1969831569 cites W1641881959 @default.
- W1969831569 cites W1973671776 @default.
- W1969831569 cites W1985455874 @default.
- W1969831569 cites W1987156197 @default.
- W1969831569 cites W2002734768 @default.
- W1969831569 cites W2033854524 @default.
- W1969831569 cites W2036858306 @default.
- W1969831569 cites W2049308628 @default.
- W1969831569 cites W2052464032 @default.
- W1969831569 cites W2059132307 @default.
- W1969831569 cites W2063243234 @default.
- W1969831569 cites W2081336291 @default.
- W1969831569 cites W2103199774 @default.
- W1969831569 cites W2170220990 @default.
- W1969831569 cites W2747166178 @default.
- W1969831569 cites W396058526 @default.
- W1969831569 doi "https://doi.org/10.1016/j.apsusc.2004.11.052" @default.
- W1969831569 hasPublicationYear "2005" @default.
- W1969831569 type Work @default.
- W1969831569 sameAs 1969831569 @default.
- W1969831569 citedByCount "0" @default.
- W1969831569 crossrefType "journal-article" @default.
- W1969831569 hasAuthorship W1969831569A5057651898 @default.
- W1969831569 hasConcept C121332964 @default.
- W1969831569 hasConcept C159467904 @default.
- W1969831569 hasConcept C178790620 @default.
- W1969831569 hasConcept C184779094 @default.
- W1969831569 hasConcept C185592680 @default.
- W1969831569 hasConcept C192562407 @default.
- W1969831569 hasConcept C512968161 @default.
- W1969831569 hasConcept C546029482 @default.
- W1969831569 hasConceptScore W1969831569C121332964 @default.
- W1969831569 hasConceptScore W1969831569C159467904 @default.
- W1969831569 hasConceptScore W1969831569C178790620 @default.
- W1969831569 hasConceptScore W1969831569C184779094 @default.
- W1969831569 hasConceptScore W1969831569C185592680 @default.
- W1969831569 hasConceptScore W1969831569C192562407 @default.
- W1969831569 hasConceptScore W1969831569C512968161 @default.
- W1969831569 hasConceptScore W1969831569C546029482 @default.
- W1969831569 hasIssue "1-4" @default.
- W1969831569 hasLocation W19698315691 @default.
- W1969831569 hasOpenAccess W1969831569 @default.
- W1969831569 hasPrimaryLocation W19698315691 @default.
- W1969831569 hasRelatedWork W1499164452 @default.
- W1969831569 hasRelatedWork W1963607084 @default.
- W1969831569 hasRelatedWork W1969676722 @default.
- W1969831569 hasRelatedWork W1979923888 @default.
- W1969831569 hasRelatedWork W1995068023 @default.
- W1969831569 hasRelatedWork W2052753458 @default.
- W1969831569 hasRelatedWork W2071062604 @default.
- W1969831569 hasRelatedWork W2077752798 @default.
- W1969831569 hasRelatedWork W3013946348 @default.
- W1969831569 hasRelatedWork W343844303 @default.
- W1969831569 hasVolume "244" @default.
- W1969831569 isParatext "false" @default.
- W1969831569 isRetracted "false" @default.
- W1969831569 magId "1969831569" @default.
- W1969831569 workType "article" @default.