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- W1969898103 abstract "This paper describes the application of a novel band-pass sliding mode control (SMC) to MEMS-based resonators and resonant sensors (e.g. vibrating gyroscopes). The proposed technique relies on a binary electrostatic actuation of the movable mass, dependent on the dynamics of the sliding surface, in such a way that the generated oscillations track changes in the mechanical resonant frequency. The architecture has a low hardware complexity and is suitable for VLSI implementation, in addition to a robust tracking behavior for large variations in the parameters of the resonator (e.g. temperature-induced changes in the stiffness coefficient). The results suggests that the novel SMC- based oscillator offers an advantageous alternative to more costly phased-locked loop (PLL) architectures traditionally used for the driving of MEMS resonator structures." @default.
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- W1969898103 date "2011-01-01" @default.
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- W1969898103 title "Novel sliding mode control for MEMS-based resonators" @default.
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- W1969898103 doi "https://doi.org/10.1016/j.proeng.2011.12.322" @default.
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