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- W1969901838 abstract "Nitrided gate oxide layers have been characterized using electron energy loss spectroscopy coupled with a field emission gun electron microscope. It is demonstrated that quantitative analysis of nitrogen is possible with a high analytical spatial resolution of the order of 1 nm. A profile of the nitrogen distribution from the Si/(nitrided oxide) interface to the surface has been obtained." @default.
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- W1969901838 date "1995-07-01" @default.
- W1969901838 modified "2023-10-18" @default.
- W1969901838 title "Characterization of thin nitrided oxide layers using high spatial resolution transmission electron energy loss spectrometry" @default.
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- W1969901838 doi "https://doi.org/10.1016/0022-3093(95)00166-2" @default.
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