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- W1969955906 abstract "The characteristics of Si etching using nonionic cluster beams with highly reactive chlorine-trifluoride (ClF3) gas were examined. An etching rate of 40 µm/min or higher was obtained even at room temperature when a ClF3 molecular cluster was formed and irradiated on a single-crystal Si substrate in high vacuum. The etching selectivity of Si with respect to a photoresist and SiO2 was at least 1:1000. We also succeeded in highly anisotropic etching with an aspect ratio of 10 or higher. Moreover, this etching method has a great advantage of low damage, compared with the conventional plasma process." @default.
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- W1969955906 date "2010-12-10" @default.
- W1969955906 modified "2023-09-26" @default.
- W1969955906 title "Anisotropic Etching Using Reactive Cluster Beams" @default.
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- W1969955906 doi "https://doi.org/10.1143/apex.3.126501" @default.
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