Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969972612> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W1969972612 endingPage "71" @default.
- W1969972612 startingPage "69" @default.
- W1969972612 abstract "The outdiffusion behavior of oxygen and carbon in heat-treated Czochralski (CZ) silicon has been investigated by secondary ion mass spectroscopy. The results show that oxygen diffusion is greatly retarded by oxygen precipitation and strongly support a vacancy-dominant diffusion mechanism for oxygen in silicon. In carbon-doped CZ silicon, the diffusion of both oxygen and carbon is greatly enhanced at 750 °C, but is significantly retarded at 1000 °C. In conjunction with the infrared absorption data, the enhanced diffusion has been attributed to the formation of fast-diffusing O-C complexes, while the retarded diffusion of carbon has been tentatively attributed to the formation of slow-diffusing complexes, such as Si-O-C." @default.
- W1969972612 created "2016-06-24" @default.
- W1969972612 creator A5006093729 @default.
- W1969972612 creator A5017407130 @default.
- W1969972612 creator A5047438688 @default.
- W1969972612 date "1988-07-04" @default.
- W1969972612 modified "2023-09-27" @default.
- W1969972612 title "Outdiffusion of oxygen and carbon in Czochralski silicon" @default.
- W1969972612 cites W1970945394 @default.
- W1969972612 cites W1977469431 @default.
- W1969972612 cites W1978012261 @default.
- W1969972612 cites W1985171645 @default.
- W1969972612 cites W1985351856 @default.
- W1969972612 cites W1994320249 @default.
- W1969972612 cites W2045273716 @default.
- W1969972612 cites W2048779195 @default.
- W1969972612 cites W2051024068 @default.
- W1969972612 cites W2078140681 @default.
- W1969972612 cites W2085998020 @default.
- W1969972612 cites W2122628938 @default.
- W1969972612 cites W2736621048 @default.
- W1969972612 doi "https://doi.org/10.1063/1.100126" @default.
- W1969972612 hasPublicationYear "1988" @default.
- W1969972612 type Work @default.
- W1969972612 sameAs 1969972612 @default.
- W1969972612 citedByCount "43" @default.
- W1969972612 countsByYear W19699726122012 @default.
- W1969972612 countsByYear W19699726122013 @default.
- W1969972612 countsByYear W19699726122014 @default.
- W1969972612 countsByYear W19699726122018 @default.
- W1969972612 countsByYear W19699726122019 @default.
- W1969972612 countsByYear W19699726122021 @default.
- W1969972612 crossrefType "journal-article" @default.
- W1969972612 hasAuthorship W1969972612A5006093729 @default.
- W1969972612 hasAuthorship W1969972612A5017407130 @default.
- W1969972612 hasAuthorship W1969972612A5047438688 @default.
- W1969972612 hasConcept C104779481 @default.
- W1969972612 hasConcept C113196181 @default.
- W1969972612 hasConcept C121332964 @default.
- W1969972612 hasConcept C140205800 @default.
- W1969972612 hasConcept C153642686 @default.
- W1969972612 hasConcept C159985019 @default.
- W1969972612 hasConcept C178790620 @default.
- W1969972612 hasConcept C179104552 @default.
- W1969972612 hasConcept C185592680 @default.
- W1969972612 hasConcept C192562407 @default.
- W1969972612 hasConcept C43617362 @default.
- W1969972612 hasConcept C49040817 @default.
- W1969972612 hasConcept C540031477 @default.
- W1969972612 hasConcept C544956773 @default.
- W1969972612 hasConcept C69357855 @default.
- W1969972612 hasConcept C97355855 @default.
- W1969972612 hasConceptScore W1969972612C104779481 @default.
- W1969972612 hasConceptScore W1969972612C113196181 @default.
- W1969972612 hasConceptScore W1969972612C121332964 @default.
- W1969972612 hasConceptScore W1969972612C140205800 @default.
- W1969972612 hasConceptScore W1969972612C153642686 @default.
- W1969972612 hasConceptScore W1969972612C159985019 @default.
- W1969972612 hasConceptScore W1969972612C178790620 @default.
- W1969972612 hasConceptScore W1969972612C179104552 @default.
- W1969972612 hasConceptScore W1969972612C185592680 @default.
- W1969972612 hasConceptScore W1969972612C192562407 @default.
- W1969972612 hasConceptScore W1969972612C43617362 @default.
- W1969972612 hasConceptScore W1969972612C49040817 @default.
- W1969972612 hasConceptScore W1969972612C540031477 @default.
- W1969972612 hasConceptScore W1969972612C544956773 @default.
- W1969972612 hasConceptScore W1969972612C69357855 @default.
- W1969972612 hasConceptScore W1969972612C97355855 @default.
- W1969972612 hasIssue "1" @default.
- W1969972612 hasLocation W19699726121 @default.
- W1969972612 hasOpenAccess W1969972612 @default.
- W1969972612 hasPrimaryLocation W19699726121 @default.
- W1969972612 hasRelatedWork W189565455 @default.
- W1969972612 hasRelatedWork W1964752226 @default.
- W1969972612 hasRelatedWork W1969972612 @default.
- W1969972612 hasRelatedWork W2012686968 @default.
- W1969972612 hasRelatedWork W2042127189 @default.
- W1969972612 hasRelatedWork W2043936101 @default.
- W1969972612 hasRelatedWork W2045403137 @default.
- W1969972612 hasRelatedWork W2077535100 @default.
- W1969972612 hasRelatedWork W2078103487 @default.
- W1969972612 hasRelatedWork W2118567242 @default.
- W1969972612 hasVolume "53" @default.
- W1969972612 isParatext "false" @default.
- W1969972612 isRetracted "false" @default.
- W1969972612 magId "1969972612" @default.
- W1969972612 workType "article" @default.