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W1969980995 abstract "Membrane waveguides with a thickness of 100nm, fabricated in SiON technology, have been used for the measuring the deflection of moving parts. The smallest displacement that can be detected is less than a nanometre." @default.
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W1969980995 date "2005-04-06" @default.
W1969980995 modified "2023-09-28" @default.
W1969980995 title "Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements" @default.
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