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- W1969986019 abstract "Abstract A reactor design developed for coating three-dimensional substrates is presented. Cathodic deposition was investigated to obtain highly cross-linked insulating films. The properties of films deposited from hexamethyldisilazane and tetraethylorthosilicate sources are discussed and compared." @default.
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- W1969986019 date "1991-07-01" @default.
- W1969986019 modified "2023-09-27" @default.
- W1969986019 title "Insulation and passivation of three-dimensional substrates by plasma-CVD thin films using silicon-organic compounds" @default.
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- W1969986019 doi "https://doi.org/10.1016/0921-5093(91)90646-5" @default.
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