Matches in SemOpenAlex for { <https://semopenalex.org/work/W1970124737> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1970124737 endingPage "2440" @default.
- W1970124737 startingPage "2436" @default.
- W1970124737 abstract "As reported in our previous work, at high (near glancing) angles of incidence of the ion beam, a quasiperiodic, comb-blade-like metal structure can form in focused ion beam induced deposition, most typically in tungsten but also in gold, platinum, or copper depositions. This kind of discontinuity tends to increase the resistance if a metal link needs to be made across a rather deep and near-vertical wall. On the other hand, if controlled, it may find some useful applications in nanofabrication. We investigated this phenomenon by using ‘‘milling-and-deposition’’ on single crystal silicon and examining the correlation between the ‘‘period’’ and various experimental parameters. We found that there is no correlation between the period and step size of beam scanning. The average period depends on the beam incidence angle (relative to the surface normal), and especially on the ion beam energy. The average period is 55, 75, and 105 nm for the Ga+ energy at 10, 20, and 25 keV, respectively, when the beam incidence angle during deposition is around 75°. The thickness of the ‘‘comb blades’’ is about 75±25 nm. The period becomes larger as the beam energy and beam incidence angle increases." @default.
- W1970124737 created "2016-06-24" @default.
- W1970124737 creator A5076026607 @default.
- W1970124737 creator A5083916238 @default.
- W1970124737 date "1993-11-01" @default.
- W1970124737 modified "2023-09-26" @default.
- W1970124737 title "Quasiperiodic nanostructures in focused ion beam deposited tungsten at high angles of incidence" @default.
- W1970124737 doi "https://doi.org/10.1116/1.587001" @default.
- W1970124737 hasPublicationYear "1993" @default.
- W1970124737 type Work @default.
- W1970124737 sameAs 1970124737 @default.
- W1970124737 citedByCount "11" @default.
- W1970124737 countsByYear W19701247372019 @default.
- W1970124737 countsByYear W19701247372021 @default.
- W1970124737 crossrefType "journal-article" @default.
- W1970124737 hasAuthorship W1970124737A5076026607 @default.
- W1970124737 hasAuthorship W1970124737A5083916238 @default.
- W1970124737 hasConcept C120665830 @default.
- W1970124737 hasConcept C121332964 @default.
- W1970124737 hasConcept C136525101 @default.
- W1970124737 hasConcept C142724271 @default.
- W1970124737 hasConcept C145148216 @default.
- W1970124737 hasConcept C151730666 @default.
- W1970124737 hasConcept C161866238 @default.
- W1970124737 hasConcept C162117346 @default.
- W1970124737 hasConcept C168834538 @default.
- W1970124737 hasConcept C178790620 @default.
- W1970124737 hasConcept C185592680 @default.
- W1970124737 hasConcept C191897082 @default.
- W1970124737 hasConcept C192562407 @default.
- W1970124737 hasConcept C204787440 @default.
- W1970124737 hasConcept C26873012 @default.
- W1970124737 hasConcept C2779116783 @default.
- W1970124737 hasConcept C2816523 @default.
- W1970124737 hasConcept C49040817 @default.
- W1970124737 hasConcept C50774322 @default.
- W1970124737 hasConcept C542268612 @default.
- W1970124737 hasConcept C544956773 @default.
- W1970124737 hasConcept C55637507 @default.
- W1970124737 hasConcept C64297162 @default.
- W1970124737 hasConcept C71924100 @default.
- W1970124737 hasConcept C86803240 @default.
- W1970124737 hasConceptScore W1970124737C120665830 @default.
- W1970124737 hasConceptScore W1970124737C121332964 @default.
- W1970124737 hasConceptScore W1970124737C136525101 @default.
- W1970124737 hasConceptScore W1970124737C142724271 @default.
- W1970124737 hasConceptScore W1970124737C145148216 @default.
- W1970124737 hasConceptScore W1970124737C151730666 @default.
- W1970124737 hasConceptScore W1970124737C161866238 @default.
- W1970124737 hasConceptScore W1970124737C162117346 @default.
- W1970124737 hasConceptScore W1970124737C168834538 @default.
- W1970124737 hasConceptScore W1970124737C178790620 @default.
- W1970124737 hasConceptScore W1970124737C185592680 @default.
- W1970124737 hasConceptScore W1970124737C191897082 @default.
- W1970124737 hasConceptScore W1970124737C192562407 @default.
- W1970124737 hasConceptScore W1970124737C204787440 @default.
- W1970124737 hasConceptScore W1970124737C26873012 @default.
- W1970124737 hasConceptScore W1970124737C2779116783 @default.
- W1970124737 hasConceptScore W1970124737C2816523 @default.
- W1970124737 hasConceptScore W1970124737C49040817 @default.
- W1970124737 hasConceptScore W1970124737C50774322 @default.
- W1970124737 hasConceptScore W1970124737C542268612 @default.
- W1970124737 hasConceptScore W1970124737C544956773 @default.
- W1970124737 hasConceptScore W1970124737C55637507 @default.
- W1970124737 hasConceptScore W1970124737C64297162 @default.
- W1970124737 hasConceptScore W1970124737C71924100 @default.
- W1970124737 hasConceptScore W1970124737C86803240 @default.
- W1970124737 hasIssue "6" @default.
- W1970124737 hasLocation W19701247371 @default.
- W1970124737 hasOpenAccess W1970124737 @default.
- W1970124737 hasPrimaryLocation W19701247371 @default.
- W1970124737 hasRelatedWork W178810229 @default.
- W1970124737 hasRelatedWork W1963346894 @default.
- W1970124737 hasRelatedWork W1972647723 @default.
- W1970124737 hasRelatedWork W1996053246 @default.
- W1970124737 hasRelatedWork W2024669453 @default.
- W1970124737 hasRelatedWork W2044431489 @default.
- W1970124737 hasRelatedWork W2055032082 @default.
- W1970124737 hasRelatedWork W2075363526 @default.
- W1970124737 hasRelatedWork W2148430058 @default.
- W1970124737 hasRelatedWork W2323895835 @default.
- W1970124737 hasVolume "11" @default.
- W1970124737 isParatext "false" @default.
- W1970124737 isRetracted "false" @default.
- W1970124737 magId "1970124737" @default.
- W1970124737 workType "article" @default.