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- W1970166044 abstract "The process capability of a commercially available positive diazonaphthoquinone (DNQ) photoresist, SJR 3000 series from Shipley, was evaluated. This photoresist at a film thickness of 7 - 8 microns was found to have a large process latitude and focus budget while maintaining nearly vertical wall profiles. The high contrast found with this thick film photoresist was due to a low loading of a monofunctional DNQ sensitizer which also has a high dissolution inhibition. The photoresist formulation was compatible with both AZ 400K and Microposit (MP) 2401 developers when using either a stepper or scanner exposure system. SJR photoresist was shown to provide an effective photoresist frame for electroplating metals such as copper and permalloy." @default.
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- W1970166044 date "1995-06-09" @default.
- W1970166044 modified "2023-10-06" @default.
- W1970166044 title "<title>Lithographic performance of a positive photoresist for thick-film applications</title>" @default.
- W1970166044 doi "https://doi.org/10.1117/12.210414" @default.
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