Matches in SemOpenAlex for { <https://semopenalex.org/work/W1970168223> ?p ?o ?g. }
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- W1970168223 endingPage "843" @default.
- W1970168223 startingPage "840" @default.
- W1970168223 abstract "Aluminium Nitride (AlN) films deposited by reactive r.f. magnetron sputtering, of a pure aluminium target in an argon (Ar) / nitrogen (N2) mixture atmosphere, onto Si (100) and Si (111) substrates are studied. A series of samples was obtained varying the Ar and N2 gaseous mixture maintaining the process pressure fixed. The AlN films were characterized by FTIR, X-ray diffraction, visible optical absorption, ellipsometry and stress measurements. X-ray results showed a preferential orientation in the planes (100) and (002). Films obtained in an Ar rich atmosphere presented only one vibration mode corresponding to a composition of the AlN A1 (TO) and E1 (LO) modes. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W1970168223 created "2016-06-24" @default.
- W1970168223 creator A5043453654 @default.
- W1970168223 creator A5078295946 @default.
- W1970168223 date "2010-03-23" @default.
- W1970168223 modified "2023-09-27" @default.
- W1970168223 title "Characterization of AlN films deposited by r.f. reactive sputtering aiming MEMS applications" @default.
- W1970168223 doi "https://doi.org/10.1002/pssc.200982861" @default.
- W1970168223 hasPublicationYear "2010" @default.
- W1970168223 type Work @default.
- W1970168223 sameAs 1970168223 @default.
- W1970168223 citedByCount "10" @default.
- W1970168223 countsByYear W19701682232012 @default.
- W1970168223 countsByYear W19701682232014 @default.
- W1970168223 countsByYear W19701682232017 @default.
- W1970168223 crossrefType "journal-article" @default.
- W1970168223 hasAuthorship W1970168223A5043453654 @default.
- W1970168223 hasAuthorship W1970168223A5078295946 @default.
- W1970168223 hasConcept C113196181 @default.
- W1970168223 hasConcept C120665830 @default.
- W1970168223 hasConcept C121332964 @default.
- W1970168223 hasConcept C125287762 @default.
- W1970168223 hasConcept C151730666 @default.
- W1970168223 hasConcept C159985019 @default.
- W1970168223 hasConcept C171250308 @default.
- W1970168223 hasConcept C178790620 @default.
- W1970168223 hasConcept C18293161 @default.
- W1970168223 hasConcept C185592680 @default.
- W1970168223 hasConcept C19067145 @default.
- W1970168223 hasConcept C191897082 @default.
- W1970168223 hasConcept C192562407 @default.
- W1970168223 hasConcept C194760766 @default.
- W1970168223 hasConcept C207114421 @default.
- W1970168223 hasConcept C22423302 @default.
- W1970168223 hasConcept C2779227376 @default.
- W1970168223 hasConcept C2780162792 @default.
- W1970168223 hasConcept C2816523 @default.
- W1970168223 hasConcept C43617362 @default.
- W1970168223 hasConcept C513153333 @default.
- W1970168223 hasConcept C537208039 @default.
- W1970168223 hasConcept C547737533 @default.
- W1970168223 hasConcept C61427134 @default.
- W1970168223 hasConcept C64297162 @default.
- W1970168223 hasConcept C86803240 @default.
- W1970168223 hasConceptScore W1970168223C113196181 @default.
- W1970168223 hasConceptScore W1970168223C120665830 @default.
- W1970168223 hasConceptScore W1970168223C121332964 @default.
- W1970168223 hasConceptScore W1970168223C125287762 @default.
- W1970168223 hasConceptScore W1970168223C151730666 @default.
- W1970168223 hasConceptScore W1970168223C159985019 @default.
- W1970168223 hasConceptScore W1970168223C171250308 @default.
- W1970168223 hasConceptScore W1970168223C178790620 @default.
- W1970168223 hasConceptScore W1970168223C18293161 @default.
- W1970168223 hasConceptScore W1970168223C185592680 @default.
- W1970168223 hasConceptScore W1970168223C19067145 @default.
- W1970168223 hasConceptScore W1970168223C191897082 @default.
- W1970168223 hasConceptScore W1970168223C192562407 @default.
- W1970168223 hasConceptScore W1970168223C194760766 @default.
- W1970168223 hasConceptScore W1970168223C207114421 @default.
- W1970168223 hasConceptScore W1970168223C22423302 @default.
- W1970168223 hasConceptScore W1970168223C2779227376 @default.
- W1970168223 hasConceptScore W1970168223C2780162792 @default.
- W1970168223 hasConceptScore W1970168223C2816523 @default.
- W1970168223 hasConceptScore W1970168223C43617362 @default.
- W1970168223 hasConceptScore W1970168223C513153333 @default.
- W1970168223 hasConceptScore W1970168223C537208039 @default.
- W1970168223 hasConceptScore W1970168223C547737533 @default.
- W1970168223 hasConceptScore W1970168223C61427134 @default.
- W1970168223 hasConceptScore W1970168223C64297162 @default.
- W1970168223 hasConceptScore W1970168223C86803240 @default.
- W1970168223 hasIssue "3-4" @default.
- W1970168223 hasLocation W19701682231 @default.
- W1970168223 hasOpenAccess W1970168223 @default.
- W1970168223 hasPrimaryLocation W19701682231 @default.
- W1970168223 hasRelatedWork W1967692360 @default.
- W1970168223 hasRelatedWork W1969204991 @default.
- W1970168223 hasRelatedWork W1994271692 @default.
- W1970168223 hasRelatedWork W2000919590 @default.
- W1970168223 hasRelatedWork W2316948141 @default.
- W1970168223 hasRelatedWork W2364045966 @default.
- W1970168223 hasRelatedWork W2384143870 @default.
- W1970168223 hasRelatedWork W2518972382 @default.
- W1970168223 hasRelatedWork W2890888068 @default.
- W1970168223 hasRelatedWork W2186768414 @default.
- W1970168223 hasVolume "7" @default.
- W1970168223 isParatext "false" @default.
- W1970168223 isRetracted "false" @default.
- W1970168223 magId "1970168223" @default.
- W1970168223 workType "article" @default.