FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1970201311> ?p ?o ?g. }

• W1970201311 endingPage "1421" @default.
• W1970201311 startingPage "1415" @default.
• W1970201311 abstract "The inductive coupled plasma etching of as-prepared and annealed hydrogenated amorphous silicon carbide (a-Si1−xCx:H) films using CF4/O2 chemistry is reported. The etch rate of the as-prepared films decreases when the carbon content in the films decreases. The etch rate also reduces drastically when the films are annealed. The infrared spectroscopy results show the effusion of hydrogen when the film is annealed. A reduction in the porosity of the films causes the decrease in the etch rate. The etch rates of a-Si0.5C0.5:H and a-Si0.3C0.7:H films increase with the addition of oxygen (O2) to CF4 and reached a maximum value at 30%–20% of O2, respectively. The etch rates for all the films show similar trends as functions of reactive ion etching power, inductively coupled plasma power, and chamber pressure. It has been observed that above a critical dc bias of −400 V, the etch rate is found to be dependent more significantly on the ion flux than ion bombardment." @default.
• W1970201311 created "2016-06-24" @default.
• W1970201311 creator A5048658078 @default.
• W1970201311 creator A5068875132 @default.
• W1970201311 creator A5086836494 @default.
• W1970201311 date "2003-07-01" @default.
• W1970201311 modified "2023-09-26" @default.
• W1970201311 title "Characteristics and mechanism of inductive coupled plasma etching of hydrogenated amorphous silicon carbide films" @default.
• W1970201311 cites W1541129134 @default.
• W1970201311 cites W1966453601 @default.
• W1970201311 cites W1969195006 @default.
• W1970201311 cites W1970742329 @default.
• W1970201311 cites W1972581734 @default.
• W1970201311 cites W1973289141 @default.
• W1970201311 cites W1982504871 @default.
• W1970201311 cites W1983543465 @default.
• W1970201311 cites W1984457267 @default.
• W1970201311 cites W1988153721 @default.
• W1970201311 cites W2000916932 @default.
• W1970201311 cites W2005442885 @default.
• W1970201311 cites W2007392560 @default.
• W1970201311 cites W2009905268 @default.
• W1970201311 cites W2010741662 @default.
• W1970201311 cites W2011269214 @default.
• W1970201311 cites W2014957726 @default.
• W1970201311 cites W2015900141 @default.
• W1970201311 cites W2020228598 @default.
• W1970201311 cites W2023121818 @default.
• W1970201311 cites W2027162702 @default.
• W1970201311 cites W2031129911 @default.
• W1970201311 cites W2044608825 @default.
• W1970201311 cites W2050620034 @default.
• W1970201311 cites W2051435017 @default.
• W1970201311 cites W2053473718 @default.
• W1970201311 cites W2065517678 @default.
• W1970201311 cites W2066029498 @default.
• W1970201311 cites W2081289441 @default.
• W1970201311 cites W2083740380 @default.
• W1970201311 cites W2090669930 @default.
• W1970201311 doi "https://doi.org/10.1116/1.1592807" @default.
• W1970201311 hasPublicationYear "2003" @default.
• W1970201311 type Work @default.
• W1970201311 sameAs 1970201311 @default.
• W1970201311 citedByCount "3" @default.
• W1970201311 countsByYear W19702013112019 @default.
• W1970201311 crossrefType "journal-article" @default.
• W1970201311 hasAuthorship W1970201311A5048658078 @default.
• W1970201311 hasAuthorship W1970201311A5068875132 @default.
• W1970201311 hasAuthorship W1970201311A5086836494 @default.
• W1970201311 hasConcept C100460472 @default.
• W1970201311 hasConcept C113196181 @default.
• W1970201311 hasConcept C121332964 @default.
• W1970201311 hasConcept C130472188 @default.
• W1970201311 hasConcept C159985019 @default.
• W1970201311 hasConcept C178790620 @default.
• W1970201311 hasConcept C185592680 @default.
• W1970201311 hasConcept C191897082 @default.
• W1970201311 hasConcept C192562407 @default.
• W1970201311 hasConcept C201931942 @default.
• W1970201311 hasConcept C2776390347 @default.
• W1970201311 hasConcept C2777859621 @default.
• W1970201311 hasConcept C2779227376 @default.
• W1970201311 hasConcept C2779667780 @default.
• W1970201311 hasConcept C2780722187 @default.
• W1970201311 hasConcept C43617362 @default.
• W1970201311 hasConcept C512968161 @default.
• W1970201311 hasConcept C544956773 @default.
• W1970201311 hasConcept C56052488 @default.
• W1970201311 hasConcept C62520636 @default.
• W1970201311 hasConcept C8010536 @default.
• W1970201311 hasConcept C81626474 @default.
• W1970201311 hasConcept C82706917 @default.
• W1970201311 hasConceptScore W1970201311C100460472 @default.
• W1970201311 hasConceptScore W1970201311C113196181 @default.
• W1970201311 hasConceptScore W1970201311C121332964 @default.
• W1970201311 hasConceptScore W1970201311C130472188 @default.
• W1970201311 hasConceptScore W1970201311C159985019 @default.
• W1970201311 hasConceptScore W1970201311C178790620 @default.
• W1970201311 hasConceptScore W1970201311C185592680 @default.
• W1970201311 hasConceptScore W1970201311C191897082 @default.
• W1970201311 hasConceptScore W1970201311C192562407 @default.
• W1970201311 hasConceptScore W1970201311C201931942 @default.
• W1970201311 hasConceptScore W1970201311C2776390347 @default.
• W1970201311 hasConceptScore W1970201311C2777859621 @default.
• W1970201311 hasConceptScore W1970201311C2779227376 @default.
• W1970201311 hasConceptScore W1970201311C2779667780 @default.
• W1970201311 hasConceptScore W1970201311C2780722187 @default.
• W1970201311 hasConceptScore W1970201311C43617362 @default.
• W1970201311 hasConceptScore W1970201311C512968161 @default.
• W1970201311 hasConceptScore W1970201311C544956773 @default.
• W1970201311 hasConceptScore W1970201311C56052488 @default.
• W1970201311 hasConceptScore W1970201311C62520636 @default.
• W1970201311 hasConceptScore W1970201311C8010536 @default.
• W1970201311 hasConceptScore W1970201311C81626474 @default.
• W1970201311 hasConceptScore W1970201311C82706917 @default.
• W1970201311 hasIssue "4" @default.
• W1970201311 hasLocation W19702013111 @default.
• W1970201311 hasOpenAccess W1970201311 @default.

• next