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- W1970403971 abstract "A commercially available fast injection Langmuir probe system (FILP) has been mounted on a plasma etching tool which is widely used in the semiconductor industry. The FILP has been used to obtain information on fundamental plasma parameters such as density and plasma potential as a function of machine parameters such as pressure, gas composition and power. A study has also been made of the correlation of ion density and silicon dioxide etch rate in a CF4 plasma." @default.
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- W1970403971 date "1991-03-01" @default.
- W1970403971 modified "2023-09-23" @default.
- W1970403971 title "<title>Fast-injection Langmuir probe for process diagnostic and control</title>" @default.
- W1970403971 doi "https://doi.org/10.1117/12.48943" @default.
- W1970403971 hasPublicationYear "1991" @default.
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