FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1970405203> ?p ?o ?g. }

• W1970405203 endingPage "197" @default.
• W1970405203 startingPage "193" @default.
• W1970405203 abstract "AlN thin films, 326–366 nm thick, were deposited by reactive d.c. magnetron sputtering on glass and monocrystal KCl substrates. The deposition parameters (nitrogen partial pressure, total sputtering pressure, discharge voltage and deposition time) were correlated and their influences on the structural and optical properties of the films were determined by means of X-ray diffraction, scanning electron microscopy and spectrophotometry. The experimental results confirmed the polycrystalline hexagonal wurtzite structure of AlN thin films. The c-axis orientation increase with decreasing of N2 concentration. The deposited AlN films at lower N2 partial pressure possess better optical constants—;higher value of refractive index and lower value of coefficient of extinction. All the deposition films are transparent in the visible region with average transmittance about 83%." @default.
• W1970405203 created "2016-06-24" @default.
• W1970405203 creator A5014693648 @default.
• W1970405203 creator A5033551748 @default.
• W1970405203 creator A5091381584 @default.
• W1970405203 date "1998-03-01" @default.
• W1970405203 modified "2023-09-23" @default.
• W1970405203 title "Study of reactive DC magnetron sputtering deposition of AlN thin films" @default.
• W1970405203 cites W1963839256 @default.
• W1970405203 cites W1969195748 @default.
• W1970405203 cites W1976350799 @default.
• W1970405203 cites W1979839716 @default.
• W1970405203 cites W1986284610 @default.
• W1970405203 cites W2013561399 @default.
• W1970405203 cites W2014687159 @default.
• W1970405203 cites W2021564049 @default.
• W1970405203 cites W2021974186 @default.
• W1970405203 cites W2037839557 @default.
• W1970405203 cites W2041498002 @default.
• W1970405203 cites W2041676691 @default.
• W1970405203 cites W2047723912 @default.
• W1970405203 cites W2058917086 @default.
• W1970405203 cites W2067643095 @default.
• W1970405203 cites W2084163256 @default.
• W1970405203 cites W2091294104 @default.
• W1970405203 cites W2141399311 @default.
• W1970405203 doi "https://doi.org/10.1016/s0042-207x(97)00128-0" @default.
• W1970405203 hasPublicationYear "1998" @default.
• W1970405203 type Work @default.
• W1970405203 sameAs 1970405203 @default.
• W1970405203 citedByCount "15" @default.
• W1970405203 countsByYear W19704052032013 @default.
• W1970405203 countsByYear W19704052032016 @default.
• W1970405203 countsByYear W19704052032018 @default.
• W1970405203 countsByYear W19704052032019 @default.
• W1970405203 countsByYear W19704052032021 @default.
• W1970405203 crossrefType "journal-article" @default.
• W1970405203 hasAuthorship W1970405203A5014693648 @default.
• W1970405203 hasAuthorship W1970405203A5033551748 @default.
• W1970405203 hasAuthorship W1970405203A5091381584 @default.
• W1970405203 hasConcept C113196181 @default.
• W1970405203 hasConcept C120665830 @default.
• W1970405203 hasConcept C121332964 @default.
• W1970405203 hasConcept C137637335 @default.
• W1970405203 hasConcept C150493377 @default.
• W1970405203 hasConcept C151730666 @default.
• W1970405203 hasConcept C159985019 @default.
• W1970405203 hasConcept C171250308 @default.
• W1970405203 hasConcept C178790620 @default.
• W1970405203 hasConcept C185592680 @default.
• W1970405203 hasConcept C19067145 @default.
• W1970405203 hasConcept C191897082 @default.
• W1970405203 hasConcept C192562407 @default.
• W1970405203 hasConcept C22423302 @default.
• W1970405203 hasConcept C26771246 @default.
• W1970405203 hasConcept C2816523 @default.
• W1970405203 hasConcept C3045981 @default.
• W1970405203 hasConcept C42067758 @default.
• W1970405203 hasConcept C43617362 @default.
• W1970405203 hasConcept C49040817 @default.
• W1970405203 hasConcept C535196362 @default.
• W1970405203 hasConcept C540031477 @default.
• W1970405203 hasConcept C61427134 @default.
• W1970405203 hasConcept C64297162 @default.
• W1970405203 hasConcept C68463220 @default.
• W1970405203 hasConcept C76046532 @default.
• W1970405203 hasConcept C86803240 @default.
• W1970405203 hasConceptScore W1970405203C113196181 @default.
• W1970405203 hasConceptScore W1970405203C120665830 @default.
• W1970405203 hasConceptScore W1970405203C121332964 @default.
• W1970405203 hasConceptScore W1970405203C137637335 @default.
• W1970405203 hasConceptScore W1970405203C150493377 @default.
• W1970405203 hasConceptScore W1970405203C151730666 @default.
• W1970405203 hasConceptScore W1970405203C159985019 @default.
• W1970405203 hasConceptScore W1970405203C171250308 @default.
• W1970405203 hasConceptScore W1970405203C178790620 @default.
• W1970405203 hasConceptScore W1970405203C185592680 @default.
• W1970405203 hasConceptScore W1970405203C19067145 @default.
• W1970405203 hasConceptScore W1970405203C191897082 @default.
• W1970405203 hasConceptScore W1970405203C192562407 @default.
• W1970405203 hasConceptScore W1970405203C22423302 @default.
• W1970405203 hasConceptScore W1970405203C26771246 @default.
• W1970405203 hasConceptScore W1970405203C2816523 @default.
• W1970405203 hasConceptScore W1970405203C3045981 @default.
• W1970405203 hasConceptScore W1970405203C42067758 @default.
• W1970405203 hasConceptScore W1970405203C43617362 @default.
• W1970405203 hasConceptScore W1970405203C49040817 @default.
• W1970405203 hasConceptScore W1970405203C535196362 @default.
• W1970405203 hasConceptScore W1970405203C540031477 @default.
• W1970405203 hasConceptScore W1970405203C61427134 @default.
• W1970405203 hasConceptScore W1970405203C64297162 @default.
• W1970405203 hasConceptScore W1970405203C68463220 @default.
• W1970405203 hasConceptScore W1970405203C76046532 @default.
• W1970405203 hasConceptScore W1970405203C86803240 @default.
• W1970405203 hasIssue "3" @default.
• W1970405203 hasLocation W19704052031 @default.
• W1970405203 hasOpenAccess W1970405203 @default.
• W1970405203 hasPrimaryLocation W19704052031 @default.

• next