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• W1970492015 abstract "Cl<SUB>2</SUB> and O<SUB>3</SUB> gas detection at high sensitivity has been realized by newly developed thin-film gas sensors incorporating multicomponent oxides such as ZnO-In<SUB>2</SUB>O<SUB>3</SUB>, MgO-In<SUB>2</SUB>O<SUB>3</SUB>, and Zn<SUB>2</SUB>In<SUB>2</SUB>-MgIn<SUB>2</SUB>O<SUB>4</SUB> systems. The sensors exhibited an increase in resistance with exposure to Cl<SUB>2</SUB> or O<SUB>3</SUB> gas. The sensing properties of the multicomponent oxide thin-film sensors were strongly dependent on the composition of the multicomponent oxide films used as well as the operating temperature. The highest sensitivity for Cl<SUB>2</SUB> and O<SUB>3</SUB> gases was obtained in sensors using a Zn<SUB>2</SUB>In<SUB>2</SUB>O<SUB>5</SUB>- MgIn<SUB>2</SUB>O<SUB>4</SUB> thin film prepared with Zn<SUB>2</SUB>In<SUB>2</SUB>O<SUB>5</SUB> contents of about 60 and 20 mol. percent respectively: Cl<SUB>2</SUB> gas detected at a minimum concentration of 0.01 and O<SUB>3</SUB> gas at 0.4ppm. A fast response as well as a high sensitivity were obtained in these sensors operated with alternating exposures in air and Cl₂ or O₃ gas. The resistivity, carrier concentration and Hall mobility of the thin-film sensors were measured under operation conditions using the van der Pauw method. It should be noted that a decrease or increase of resistivity in the thin-film sensors resulted from a simultaneously increase or decrease of both carrier concentration and Hall mobility. The increase in resistivity is attributed to the trapping of free electrons resulting from Cl<SUB>2</SUB> and O<SUB>3</SUB> being adsorbed on grain boundaries and/or the film surface, the same as that produced by adsorption of oxygen. A Zn<SUB>2</SUB>In<SUB>2</SUB>O<SUB>5</SUB>- MgIn<SUB>2</SUB>O<SUB>4</SUB> thin-film gas sensor exhibited very stable long term operation in an atmosphere with a high concentration of Cl<SUB>2</SUB> gas." @default.
• W1970492015 created "2016-06-24" @default.
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• W1970492015 date "1999-07-12" @default.
• W1970492015 modified "2023-09-28" @default.
• W1970492015 title "<title>New multicomponent oxide materials for thin film gas sensors</title>" @default.
• W1970492015 doi "https://doi.org/10.1117/12.352810" @default.
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