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- W1970717811 abstract "Abstract A new method of achieving an accelerometer with the desired damping value based on electrostatic forces over the seismic mass is analyzed. This method avoids the temperature dependence of the damping and allows its accurate control after the encapsulation process, even though the mechanical performance of the device may vary from unit to unit. It also permits self-testing and calibration of the accelerometer. The characteristics of this accelerometer have been simulated using FEM and an equivalent electrical circuit. A detailed analysis of the useful range and stability behaviour compared with classical viscous damping is also presented." @default.
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- W1970717811 date "1993-06-01" @default.
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- W1970717811 title "Analysis of electrostatic-damped piezoresistive silicon accelerometers" @default.
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- W1970717811 doi "https://doi.org/10.1016/0924-4247(93)80053-j" @default.
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