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- W1970722402 abstract "It is shown that a temperature-dependent series resistance of the back contact of the semiconducting substrate in MIS capacitors can lead to transient charging of the insulator at low temperatures. Both the position and height of the corresponding deep-level transient current spectroscopy (DLTCS) peak are shown to be functions of the insulator capacitances of individual structures on a common substrate. The experimentally observed low temperature peak of DLTCS in Al-SiO2-Si(n) diodes is found to exhibit all the qualitative features predicted for the case of a non-negligible series resistance, the resistance of the back contact being shunted by a parallel capacitance Cs. Finally, a correlation between time and frequency domain experiments is demonstrated." @default.
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- W1970722402 date "1984-04-14" @default.
- W1970722402 modified "2023-10-15" @default.
- W1970722402 title "On the origin of transient charging of the insulator of Al-SiO2-Si structures in deep-level transient current spectroscopy experiments" @default.
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- W1970722402 doi "https://doi.org/10.1088/0022-3727/17/4/022" @default.
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