Matches in SemOpenAlex for { <https://semopenalex.org/work/W1970805930> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1970805930 endingPage "1907" @default.
- W1970805930 startingPage "1897" @default.
- W1970805930 abstract "The rapid development of a wide variety of new devices in microelectronics, sensors, MEMS and NEMS has led to new challenges in characterizing their mechanical behavior and assessing their reliability. Static and dynamic mechanical behavior measurement of micro-objects and low-dimension films has become a key issue. In this paper, an optical probe stage has been proposed to test the deformation of micro-objects. The technique is based on optical interferometry and actuator-driven cantilever/plate deformed probes. In the proposed apparatus, a monochromatic object light is used to illuminate the deformed probes and measured micro-objects. The interference fringe pattern related to deformations of deflections of the probes and the micro-objects was analyzed to obtain the loading forces exerted by the probes and the deformations of micro-objects. Properties of static and dynamic deformations of different kinds of probes were investigated and the optical probe stage was applied in deformation measurement, microforce testing and bonded wire fatigue analysis of a metal-oxide semiconductor chip." @default.
- W1970805930 created "2016-06-24" @default.
- W1970805930 creator A5063386029 @default.
- W1970805930 creator A5078525559 @default.
- W1970805930 date "2006-08-04" @default.
- W1970805930 modified "2023-09-27" @default.
- W1970805930 title "An optical probe stage and its applications in mechanical behavior measurements of micro-objects and thin films" @default.
- W1970805930 cites W1964800497 @default.
- W1970805930 cites W1964909042 @default.
- W1970805930 cites W1967364318 @default.
- W1970805930 cites W1972065247 @default.
- W1970805930 cites W1975126935 @default.
- W1970805930 cites W1977029043 @default.
- W1970805930 cites W1982349636 @default.
- W1970805930 cites W1983671569 @default.
- W1970805930 cites W1984261480 @default.
- W1970805930 cites W1993624579 @default.
- W1970805930 cites W2006174530 @default.
- W1970805930 cites W2009398677 @default.
- W1970805930 cites W2009400107 @default.
- W1970805930 cites W2009995329 @default.
- W1970805930 cites W2021718770 @default.
- W1970805930 cites W2025086636 @default.
- W1970805930 cites W2030829304 @default.
- W1970805930 cites W2046008264 @default.
- W1970805930 cites W2053340968 @default.
- W1970805930 cites W2057688540 @default.
- W1970805930 cites W2058230957 @default.
- W1970805930 cites W2062816299 @default.
- W1970805930 cites W2070294760 @default.
- W1970805930 cites W2079044338 @default.
- W1970805930 cites W2079590986 @default.
- W1970805930 cites W2109000180 @default.
- W1970805930 cites W2148078585 @default.
- W1970805930 cites W4241153771 @default.
- W1970805930 doi "https://doi.org/10.1088/0960-1317/16/9/020" @default.
- W1970805930 hasPublicationYear "2006" @default.
- W1970805930 type Work @default.
- W1970805930 sameAs 1970805930 @default.
- W1970805930 citedByCount "4" @default.
- W1970805930 countsByYear W19708059302014 @default.
- W1970805930 countsByYear W19708059302022 @default.
- W1970805930 crossrefType "journal-article" @default.
- W1970805930 hasAuthorship W1970805930A5063386029 @default.
- W1970805930 hasAuthorship W1970805930A5078525559 @default.
- W1970805930 hasConcept C120665830 @default.
- W1970805930 hasConcept C121332964 @default.
- W1970805930 hasConcept C127313418 @default.
- W1970805930 hasConcept C146357865 @default.
- W1970805930 hasConcept C151730666 @default.
- W1970805930 hasConcept C171250308 @default.
- W1970805930 hasConcept C19067145 @default.
- W1970805930 hasConcept C192562407 @default.
- W1970805930 hasConcept C49040817 @default.
- W1970805930 hasConceptScore W1970805930C120665830 @default.
- W1970805930 hasConceptScore W1970805930C121332964 @default.
- W1970805930 hasConceptScore W1970805930C127313418 @default.
- W1970805930 hasConceptScore W1970805930C146357865 @default.
- W1970805930 hasConceptScore W1970805930C151730666 @default.
- W1970805930 hasConceptScore W1970805930C171250308 @default.
- W1970805930 hasConceptScore W1970805930C19067145 @default.
- W1970805930 hasConceptScore W1970805930C192562407 @default.
- W1970805930 hasConceptScore W1970805930C49040817 @default.
- W1970805930 hasIssue "9" @default.
- W1970805930 hasLocation W19708059301 @default.
- W1970805930 hasOpenAccess W1970805930 @default.
- W1970805930 hasPrimaryLocation W19708059301 @default.
- W1970805930 hasRelatedWork W1969330179 @default.
- W1970805930 hasRelatedWork W2020567181 @default.
- W1970805930 hasRelatedWork W2067393306 @default.
- W1970805930 hasRelatedWork W2071600213 @default.
- W1970805930 hasRelatedWork W2095553506 @default.
- W1970805930 hasRelatedWork W2150801153 @default.
- W1970805930 hasRelatedWork W2317988969 @default.
- W1970805930 hasRelatedWork W2328710835 @default.
- W1970805930 hasRelatedWork W2720647270 @default.
- W1970805930 hasRelatedWork W4200206782 @default.
- W1970805930 hasVolume "16" @default.
- W1970805930 isParatext "false" @default.
- W1970805930 isRetracted "false" @default.
- W1970805930 magId "1970805930" @default.
- W1970805930 workType "article" @default.