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- W1970948486 abstract "In this paper, we present reusable quartz master fabricated by electron-beam lithography and dry etching process of quartz, and results of injection molding based on the reusable quartz master for the manufacturing of nano-scale information media Since patterned structures of photoresist can be easily damaged by separation (demolding) process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process In this work, we have made it posslble of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process We have designed and fabricated four different specimens including 100nm, 140nm, 200nm and 400nm pit patterns In addition, both intaglio and embossed carving patterns are fabricated for each specimen In the preliminary test of injection molding, we have fabricated polycarbonate patterns with varying mold temperature We have experimentally verified the fabrication process of the reusable quartz master and possibility of quartz master as direct stamper." @default.
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- W1970948486 date "2005-02-01" @default.
- W1970948486 modified "2023-10-16" @default.
- W1970948486 title "Fabrication of Nanoscale Reusable Quartz Master for Nano Injection Molding Process" @default.
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- W1970948486 doi "https://doi.org/10.3795/ksme-a.2005.29.2.228" @default.
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