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• W1970972971 abstract "The plasma in the plume produced by the pulsed laser evaporation with a YAG laser (532 nm) of a graphite target, and its role in the growth of amorphous carbon films have been investigated. For a laser power of 1010 W/cm2, the mean velocity of particles in the plasma was about 8 cm/μs. The plasma component of the plume was fully deflected using a static magnetic field, allowing to deposit amorphous carbon films with and without plasma. Micro-Raman spectroscopy analysis showed that the amount of sp3 hybridized carbon atoms of the nonplasma amorphous carbon decreased to about half the amount found in the full plume deposited films. Particles in the plasma constituted 23% of the total deposited mass, as estimated from the difference in thickness and density of both kinds of grown films. Langmuir probe measurements gave a similar value for the plasma proportion of 25% if particles in the plasma were singly ionized monatomic carbon. This result was consistent with the experimental ion velocity distribution, which was fitted to five Maxwell–Boltzmann distributions in which one of them carried most of the charge in the plasma." @default.
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• W1970972971 date "1998-07-01" @default.
• W1970972971 modified "2023-09-26" @default.
• W1970972971 title "Role of the plasma in the growth of amorphous carbon films by pulsed laser deposition" @default.
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• W1970972971 doi "https://doi.org/10.1063/1.368062" @default.
• W1970972971 hasPublicationYear "1998" @default.
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