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- W1971279385 abstract "We report on the effects of <TEX>$TiO_2$</TEX> doping power on the characteristics of multicomponent <TEX>$TiO_2$</TEX>-ITO (TITO) electrodes prepared by a multi-target sputtering system with tilted cathode guns. Both as-deposited and annealed TITO electrodes showed linearly increased sheet resistance and resistivity with increasing <TEX>$TiO_2$</TEX> doping power. However, the TITO electrodes exhibited a fairly high optical transmittance regardless of the <TEX>$TiO_2$</TEX> doping power due to the high transparency of the <TEX>$TiO_2$</TEX>. Although the annealed TITO showed much lower sheet resistance and resistivity relative to the as-deposited samples, the electrical properties of the annealed samples exhibited similar dependence on the <TEX>$TiO_2$</TEX> power to the as-deposited samples. In addition, it was found that doping of an anatase <TEX>$TiO_2$</TEX> in the ITO electrode prevented the preferred (222) orientation of the TITO electrodes. Although the TITO electrode showed higher sheet resistance and resistivity than that of the pure ITO electrode, it offers a very smooth surface and usage of a low-cost Ti element. It is thus considered a promising multicomponent transparent conducting electrode for cost-efficient flat panel displays and photovoltatics." @default.
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- W1971279385 date "2011-07-01" @default.
- W1971279385 modified "2023-10-17" @default.
- W1971279385 title "Effect of Anatase TiO_2 Doping Power on Electrical, Optical and Structural Properties of Multicomponent TiO_2-Doped ITO Electrodes" @default.
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- W1971279385 doi "https://doi.org/10.3740/mrsk.2011.21.7.371" @default.
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