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- W1971292094 abstract "Fundamental experiments have been carried out by using a two-stage electron cyclotron resonance (ECR) ion source (2.45 GHz) to produce multiply charged boron ions without gaseous feedstocks. A boron target, inserted into the ECR source, is heated and efficiently sputtered by dc bias. The B2+ ion current is successfully extracted under low microwave power (∼100 W). Dependence of extracted B+ ion current on dc bias voltage is similar to that of theoretical sputtering yield on incident ion energy." @default.
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- W1971292094 date "1994-04-01" @default.
- W1971292094 modified "2023-10-03" @default.
- W1971292094 title "Electron cyclotron resonance multicharged ion source with elemental boron" @default.
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- W1971292094 doi "https://doi.org/10.1063/1.1145081" @default.
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