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• W1971388314 abstract "Porous silicon based micro-machined peizoresistive pressure sensors are fabricated and tested in the range of 0–1 bar and temperature range of 25–80 °C. The dependence of pressure sensitivity on the variation of ambient temperature is investigated. An intelligent online temperature compensation scheme using ANN technique has been described. The proposed scheme leads to an error reduction of approximately 98% from temperature uncompensated value. A hardware implementation of the proposed scheme using micro-controller is also described." @default.
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• W1971388314 date "2006-02-01" @default.
• W1971388314 modified "2023-09-27" @default.
• W1971388314 title "Temperature compensation of piezoresistive micro-machined porous silicon pressure sensor by ANN" @default.
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• W1971388314 doi "https://doi.org/10.1016/j.microrel.2005.04.008" @default.
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