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- W1971464827 abstract "Microcrystalline silicon grown by plasma-enhanced chemical vapor deposition consists of a phase mixture of amorphous silicon and submicrometer sized columnar crystalline silicon grains. These grains do not exhibit perfect translational symmetry but show a high density of microtwins, evidenced by structural investigations by use of transmission electron microscopy and x-ray diffraction. The high twin fault density of typically every tenth {111} bilayer leads to anisotropic size broadening effects for Bragg reflection peaks. This anisotropic behavior of size broadening interferes with grain-size and strain measurements from x-ray diffractograms. Experimentally measured apparent grain sizes are up to a few ten nanometers and are subject to significant scatter due to the effect of microtwinning. Numerical modeling of the shape of Bragg reflection peaks is presented for the two characteristic modifications of microtwinning, i.e., lamellar and random twinning, to assess quantitatively the effect of microtwinning on size broadening and grain-size measurements from Bragg reflection width." @default.
- W1971464827 created "2016-06-24" @default.
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- W1971464827 date "2003-01-16" @default.
- W1971464827 modified "2023-09-28" @default.
- W1971464827 title "Microtwinning in microcrystalline silicon and its effect on grain-size measurements" @default.
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- W1971464827 doi "https://doi.org/10.1103/physrevb.67.045312" @default.
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