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- W1971562845 abstract "A triangulation distance sensor is constructed bending the wafer with metal hinges. On the Si wafer, elements are pre-aligned at the planer condition using the photolithography. The position sensitive detector (PSD), mirror, and alignment pit for a ball lens are prepared. 3-sensor array is integrated in 20x17x10 mm<sup>3</sup> size. Compared with our previous study using polymer, the metal hinge stabilizes the long-term performance and the process. Optical elements including LD chip are all included on the wafer. The demonstrated measurement range is 18-40 mm." @default.
- W1971562845 created "2016-06-24" @default.
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- W1971562845 date "2006-04-21" @default.
- W1971562845 modified "2023-09-24" @default.
- W1971562845 title "Compact triangulation sensor realized by bending wafer with metal hinge" @default.
- W1971562845 doi "https://doi.org/10.1117/12.662466" @default.
- W1971562845 hasPublicationYear "2006" @default.
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