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• W1971567350 endingPage "2370" @default.
• W1971567350 startingPage "2363" @default.
• W1971567350 abstract "We report a new approach to solution-processable low-dielectric-constant (low-k) materials including photolithographic patterning of these materials in chemically benign and environmentally friendly solvents. A series of semiperfluorinated molecular glasses with styrenic substituents were successfully synthesized. These small molecular materials were thermally stable up to 400 degrees C and also exhibited an amorphous nature, which is essential to forming uniform films. Differential scanning calorimetry studies revealed that a cross-linking reaction occurred in the presence of acid, resulting in the formation of robust polymeric films. Atomic force microscopy images of the cross-linked films showed uniform and pinhole-free surface properties. Dielectric constants determined by a capacitance measurement were 2.6-2.8 (100 kHz) at ambient conditions, which are comparable to other polymeric low-k materials. The incorporation of semiperfluorinated substituents was effective in decreasing the dielectric constant; in particular, the fluorinated alkyl ether structure proved best. In addition, the fluorinated substituents contributed to good solubility in hydrofluoroether (HFE) solvents, which enabled the successful photolithographic patterning of those materials in HFEs down to a submicrometer scale." @default.
• W1971567350 created "2016-06-24" @default.
• W1971567350 creator A5022830421 @default.
• W1971567350 creator A5045455445 @default.
• W1971567350 creator A5052313219 @default.
• W1971567350 creator A5053232971 @default.
• W1971567350 creator A5055291324 @default.
• W1971567350 creator A5071393614 @default.
• W1971567350 creator A5076127302 @default.
• W1971567350 creator A5087329892 @default.
• W1971567350 date "2009-10-06" @default.
• W1971567350 modified "2023-10-14" @default.
• W1971567350 title "Cross-Linkable Molecular Glasses: Low Dielectric Constant Materials Patternable in Hydrofluoroethers" @default.
• W1971567350 cites W1963767685 @default.
• W1971567350 cites W1969135281 @default.
• W1971567350 cites W1975085837 @default.
• W1971567350 cites W1977698364 @default.
• W1971567350 cites W1981808937 @default.
• W1971567350 cites W1987795841 @default.
• W1971567350 cites W2006801794 @default.
• W1971567350 cites W2008955717 @default.
• W1971567350 cites W2013732253 @default.
• W1971567350 cites W2014442771 @default.
• W1971567350 cites W2019931669 @default.
• W1971567350 cites W2021206411 @default.
• W1971567350 cites W2022120785 @default.
• W1971567350 cites W2026046685 @default.
• W1971567350 cites W2026803916 @default.
• W1971567350 cites W2056519820 @default.
• W1971567350 cites W2057961774 @default.
• W1971567350 cites W2070838278 @default.
• W1971567350 cites W2078300053 @default.
• W1971567350 cites W2087929002 @default.
• W1971567350 cites W2102967250 @default.
• W1971567350 cites W2122416910 @default.
• W1971567350 cites W2149266629 @default.
• W1971567350 cites W2166796013 @default.
• W1971567350 cites W2480645640 @default.
• W1971567350 cites W2501609604 @default.
• W1971567350 doi "https://doi.org/10.1021/am9004978" @default.
• W1971567350 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/20355874" @default.
• W1971567350 hasPublicationYear "2009" @default.
• W1971567350 type Work @default.
• W1971567350 sameAs 1971567350 @default.
• W1971567350 citedByCount "30" @default.
• W1971567350 countsByYear W19715673502013 @default.
• W1971567350 countsByYear W19715673502014 @default.
• W1971567350 countsByYear W19715673502015 @default.
• W1971567350 countsByYear W19715673502017 @default.
• W1971567350 countsByYear W19715673502018 @default.
• W1971567350 countsByYear W19715673502019 @default.
• W1971567350 countsByYear W19715673502020 @default.
• W1971567350 countsByYear W19715673502021 @default.
• W1971567350 countsByYear W19715673502022 @default.
• W1971567350 countsByYear W19715673502023 @default.
• W1971567350 crossrefType "journal-article" @default.
• W1971567350 hasAuthorship W1971567350A5022830421 @default.
• W1971567350 hasAuthorship W1971567350A5045455445 @default.
• W1971567350 hasAuthorship W1971567350A5052313219 @default.
• W1971567350 hasAuthorship W1971567350A5053232971 @default.
• W1971567350 hasAuthorship W1971567350A5055291324 @default.
• W1971567350 hasAuthorship W1971567350A5071393614 @default.
• W1971567350 hasAuthorship W1971567350A5076127302 @default.
• W1971567350 hasAuthorship W1971567350A5087329892 @default.
• W1971567350 hasConcept C121332964 @default.
• W1971567350 hasConcept C127413603 @default.
• W1971567350 hasConcept C133386390 @default.
• W1971567350 hasConcept C147789679 @default.
• W1971567350 hasConcept C155574463 @default.
• W1971567350 hasConcept C159985019 @default.
• W1971567350 hasConcept C17525397 @default.
• W1971567350 hasConcept C178790620 @default.
• W1971567350 hasConcept C185592680 @default.
• W1971567350 hasConcept C188027245 @default.
• W1971567350 hasConcept C192562407 @default.
• W1971567350 hasConcept C2780263894 @default.
• W1971567350 hasConcept C30066665 @default.
• W1971567350 hasConcept C39519442 @default.
• W1971567350 hasConcept C42360764 @default.
• W1971567350 hasConcept C49040817 @default.
• W1971567350 hasConcept C521977710 @default.
• W1971567350 hasConcept C56052488 @default.
• W1971567350 hasConcept C97355855 @default.
• W1971567350 hasConceptScore W1971567350C121332964 @default.
• W1971567350 hasConceptScore W1971567350C127413603 @default.
• W1971567350 hasConceptScore W1971567350C133386390 @default.
• W1971567350 hasConceptScore W1971567350C147789679 @default.
• W1971567350 hasConceptScore W1971567350C155574463 @default.
• W1971567350 hasConceptScore W1971567350C159985019 @default.
• W1971567350 hasConceptScore W1971567350C17525397 @default.
• W1971567350 hasConceptScore W1971567350C178790620 @default.
• W1971567350 hasConceptScore W1971567350C185592680 @default.
• W1971567350 hasConceptScore W1971567350C188027245 @default.
• W1971567350 hasConceptScore W1971567350C192562407 @default.
• W1971567350 hasConceptScore W1971567350C2780263894 @default.
• W1971567350 hasConceptScore W1971567350C30066665 @default.
• W1971567350 hasConceptScore W1971567350C39519442 @default.
• W1971567350 hasConceptScore W1971567350C42360764 @default.

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