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• W1971631976 endingPage "1477" @default.
• W1971631976 startingPage "1473" @default.
• W1971631976 abstract "The ion beam assisted etching of silicon through a mask in a low pressure fluorocarbon plasma is considered. The two-dimensional profiles of etched grooves are calculated using a proposed model involving a function of mask size, the fluxes of incident chemically active and non-active species from the plasma and bombarding ions. The model also includes the processes of adsorption, heterogeneous reactions, desorption, physical sputtering, activation of surface atoms and stochastic mixing between monolayers. Special attention is given to the etching anisotropy, lateral etching and elemental composition at the surface of a groove. It is shown, that formation of an inhibiting film on the sidewall of groove increases the etching anisotropy, however, the process of stochastic mixing leads to the formation of the altered layer in the near surface region. The thickness of altered layer and elemental composition at different surface regions of etched groove is considered." @default.
• W1971631976 created "2016-06-24" @default.
• W1971631976 creator A5020465476 @default.
• W1971631976 creator A5023045797 @default.
• W1971631976 creator A5067861169 @default.
• W1971631976 creator A5081833427 @default.
• W1971631976 creator A5085697585 @default.
• W1971631976 date "1996-12-01" @default.
• W1971631976 modified "2023-10-18" @default.
• W1971631976 title "Simulation of silicon dry etching through a mask in low pressure fluorine-based plasma" @default.
• W1971631976 cites W1968590512 @default.
• W1971631976 cites W1979084152 @default.
• W1971631976 cites W1981140855 @default.
• W1971631976 cites W2021216538 @default.
• W1971631976 cites W2044924796 @default.
• W1971631976 cites W2051314963 @default.
• W1971631976 cites W2082189087 @default.
• W1971631976 cites W2094427838 @default.
• W1971631976 cites W2561559678 @default.
• W1971631976 cites W654250101 @default.
• W1971631976 doi "https://doi.org/10.1016/s0042-207x(96)00223-0" @default.
• W1971631976 hasPublicationYear "1996" @default.
• W1971631976 type Work @default.
• W1971631976 sameAs 1971631976 @default.
• W1971631976 citedByCount "6" @default.
• W1971631976 countsByYear W19716319762018 @default.
• W1971631976 crossrefType "journal-article" @default.
• W1971631976 hasAuthorship W1971631976A5020465476 @default.
• W1971631976 hasAuthorship W1971631976A5023045797 @default.
• W1971631976 hasAuthorship W1971631976A5067861169 @default.
• W1971631976 hasAuthorship W1971631976A5081833427 @default.
• W1971631976 hasAuthorship W1971631976A5085697585 @default.
• W1971631976 hasConcept C100460472 @default.
• W1971631976 hasConcept C107187091 @default.
• W1971631976 hasConcept C113196181 @default.
• W1971631976 hasConcept C120665830 @default.
• W1971631976 hasConcept C121332964 @default.
• W1971631976 hasConcept C1291036 @default.
• W1971631976 hasConcept C130472188 @default.
• W1971631976 hasConcept C147789679 @default.
• W1971631976 hasConcept C150394285 @default.
• W1971631976 hasConcept C159985019 @default.
• W1971631976 hasConcept C162711632 @default.
• W1971631976 hasConcept C171250308 @default.
• W1971631976 hasConcept C185592680 @default.
• W1971631976 hasConcept C19067145 @default.
• W1971631976 hasConcept C191897082 @default.
• W1971631976 hasConcept C192562407 @default.
• W1971631976 hasConcept C22423302 @default.
• W1971631976 hasConcept C2779227376 @default.
• W1971631976 hasConcept C2779472054 @default.
• W1971631976 hasConcept C43617362 @default.
• W1971631976 hasConcept C49040817 @default.
• W1971631976 hasConcept C506198293 @default.
• W1971631976 hasConcept C544956773 @default.
• W1971631976 hasConcept C62520636 @default.
• W1971631976 hasConcept C82706917 @default.
• W1971631976 hasConcept C85725439 @default.
• W1971631976 hasConceptScore W1971631976C100460472 @default.
• W1971631976 hasConceptScore W1971631976C107187091 @default.
• W1971631976 hasConceptScore W1971631976C113196181 @default.
• W1971631976 hasConceptScore W1971631976C120665830 @default.
• W1971631976 hasConceptScore W1971631976C121332964 @default.
• W1971631976 hasConceptScore W1971631976C1291036 @default.
• W1971631976 hasConceptScore W1971631976C130472188 @default.
• W1971631976 hasConceptScore W1971631976C147789679 @default.
• W1971631976 hasConceptScore W1971631976C150394285 @default.
• W1971631976 hasConceptScore W1971631976C159985019 @default.
• W1971631976 hasConceptScore W1971631976C162711632 @default.
• W1971631976 hasConceptScore W1971631976C171250308 @default.
• W1971631976 hasConceptScore W1971631976C185592680 @default.
• W1971631976 hasConceptScore W1971631976C19067145 @default.
• W1971631976 hasConceptScore W1971631976C191897082 @default.
• W1971631976 hasConceptScore W1971631976C192562407 @default.
• W1971631976 hasConceptScore W1971631976C22423302 @default.
• W1971631976 hasConceptScore W1971631976C2779227376 @default.
• W1971631976 hasConceptScore W1971631976C2779472054 @default.
• W1971631976 hasConceptScore W1971631976C43617362 @default.
• W1971631976 hasConceptScore W1971631976C49040817 @default.
• W1971631976 hasConceptScore W1971631976C506198293 @default.
• W1971631976 hasConceptScore W1971631976C544956773 @default.
• W1971631976 hasConceptScore W1971631976C62520636 @default.
• W1971631976 hasConceptScore W1971631976C82706917 @default.
• W1971631976 hasConceptScore W1971631976C85725439 @default.
• W1971631976 hasIssue "12" @default.
• W1971631976 hasLocation W19716319761 @default.
• W1971631976 hasOpenAccess W1971631976 @default.
• W1971631976 hasPrimaryLocation W19716319761 @default.
• W1971631976 hasRelatedWork W2011001474 @default.
• W1971631976 hasRelatedWork W2023583304 @default.
• W1971631976 hasRelatedWork W2039034544 @default.
• W1971631976 hasRelatedWork W2073829503 @default.
• W1971631976 hasRelatedWork W2089600663 @default.
• W1971631976 hasRelatedWork W2093286625 @default.
• W1971631976 hasRelatedWork W2100868662 @default.
• W1971631976 hasRelatedWork W2164353131 @default.
• W1971631976 hasRelatedWork W2598927103 @default.
• W1971631976 hasRelatedWork W2620837109 @default.

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