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- W1971651608 abstract "A sheath voltage drop in asymmetric discharges is one of the most important parameters of radio-frequency capacitively coupled plasmas because it determines the kinetic energy of the ions incident on the target or substrate. In this study, we developed a numerical simulation code to estimate the sheath voltage drops and, consequently, the self-bias voltage. We roughly approximated general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code are consistent with measurements and Lieberman’s theory." @default.
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- W1971651608 date "2004-06-17" @default.
- W1971651608 modified "2023-10-18" @default.
- W1971651608 title "Synthesis of sheath voltage drops in asymmetric radio-frequency discharges" @default.
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- W1971651608 doi "https://doi.org/10.1063/1.1759787" @default.
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