Matches in SemOpenAlex for { <https://semopenalex.org/work/W1971720745> ?p ?o ?g. }
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- W1971720745 endingPage "2275" @default.
- W1971720745 startingPage "2271" @default.
- W1971720745 abstract "Precise measurements on the growth rate and the hydrogen coverage on the growing surface of SiGe epitaxial film by silane/germane gas-source molecular beam epitaxy (GSMBE) have been performed for the germane mixing ratio Xg of 0%–6%. For all Xg, the growth-rate Arrhenius plot showed a distinct separation into the high-temperature region with a lower activation energy and the low-temperature region with a higher activation energy, similar to silane GSMBE. The growth rates in the low-temperature region increased with Xg, while those in the high-temperature region peaked at Xg=0.8% and decreased thereafter. As a result the transition temperature shifted towards lower temperatures. The activation energy in the low-temperature region stayed almost unchanged or increased with Xg, which is quite contrary to the previous understandings and is thus discussed. A model is presented to describe the hydrogen desorption process from SiGe surfaces, which explains both the growth rate in the low-temperature region and the temperature-programed-desorption (TPD) spectra obtained from the quenched growing surface. The role of Ge in the low-temperature region is concluded to enhance processes involved in hydrogen desorption from Si atoms." @default.
- W1971720745 created "2016-06-24" @default.
- W1971720745 creator A5008787833 @default.
- W1971720745 creator A5053654429 @default.
- W1971720745 creator A5079788069 @default.
- W1971720745 date "1994-07-01" @default.
- W1971720745 modified "2023-09-27" @default.
- W1971720745 title "Role of Ge in SiGe epitaxial growth using silane/germane gas‐source molecular beam epitaxy" @default.
- W1971720745 doi "https://doi.org/10.1116/1.579128" @default.
- W1971720745 hasPublicationYear "1994" @default.
- W1971720745 type Work @default.
- W1971720745 sameAs 1971720745 @default.
- W1971720745 citedByCount "10" @default.
- W1971720745 countsByYear W19717207452021 @default.
- W1971720745 crossrefType "journal-article" @default.
- W1971720745 hasAuthorship W1971720745A5008787833 @default.
- W1971720745 hasAuthorship W1971720745A5053654429 @default.
- W1971720745 hasAuthorship W1971720745A5079788069 @default.
- W1971720745 hasConcept C110738630 @default.
- W1971720745 hasConcept C113196181 @default.
- W1971720745 hasConcept C147789679 @default.
- W1971720745 hasConcept C150394285 @default.
- W1971720745 hasConcept C162711632 @default.
- W1971720745 hasConcept C178790620 @default.
- W1971720745 hasConcept C185592680 @default.
- W1971720745 hasConcept C192562407 @default.
- W1971720745 hasConcept C2524010 @default.
- W1971720745 hasConcept C2776154250 @default.
- W1971720745 hasConcept C2778024649 @default.
- W1971720745 hasConcept C2778312390 @default.
- W1971720745 hasConcept C2779227376 @default.
- W1971720745 hasConcept C32909587 @default.
- W1971720745 hasConcept C33923547 @default.
- W1971720745 hasConcept C3792809 @default.
- W1971720745 hasConcept C512968161 @default.
- W1971720745 hasConcept C54419926 @default.
- W1971720745 hasConcept C544956773 @default.
- W1971720745 hasConcept C550623735 @default.
- W1971720745 hasConcept C86183883 @default.
- W1971720745 hasConcept C8739425 @default.
- W1971720745 hasConcept C95121573 @default.
- W1971720745 hasConceptScore W1971720745C110738630 @default.
- W1971720745 hasConceptScore W1971720745C113196181 @default.
- W1971720745 hasConceptScore W1971720745C147789679 @default.
- W1971720745 hasConceptScore W1971720745C150394285 @default.
- W1971720745 hasConceptScore W1971720745C162711632 @default.
- W1971720745 hasConceptScore W1971720745C178790620 @default.
- W1971720745 hasConceptScore W1971720745C185592680 @default.
- W1971720745 hasConceptScore W1971720745C192562407 @default.
- W1971720745 hasConceptScore W1971720745C2524010 @default.
- W1971720745 hasConceptScore W1971720745C2776154250 @default.
- W1971720745 hasConceptScore W1971720745C2778024649 @default.
- W1971720745 hasConceptScore W1971720745C2778312390 @default.
- W1971720745 hasConceptScore W1971720745C2779227376 @default.
- W1971720745 hasConceptScore W1971720745C32909587 @default.
- W1971720745 hasConceptScore W1971720745C33923547 @default.
- W1971720745 hasConceptScore W1971720745C3792809 @default.
- W1971720745 hasConceptScore W1971720745C512968161 @default.
- W1971720745 hasConceptScore W1971720745C54419926 @default.
- W1971720745 hasConceptScore W1971720745C544956773 @default.
- W1971720745 hasConceptScore W1971720745C550623735 @default.
- W1971720745 hasConceptScore W1971720745C86183883 @default.
- W1971720745 hasConceptScore W1971720745C8739425 @default.
- W1971720745 hasConceptScore W1971720745C95121573 @default.
- W1971720745 hasIssue "4" @default.
- W1971720745 hasLocation W19717207451 @default.
- W1971720745 hasOpenAccess W1971720745 @default.
- W1971720745 hasPrimaryLocation W19717207451 @default.
- W1971720745 hasRelatedWork W113811287 @default.
- W1971720745 hasRelatedWork W1978960732 @default.
- W1971720745 hasRelatedWork W1994878478 @default.
- W1971720745 hasRelatedWork W2006692646 @default.
- W1971720745 hasRelatedWork W2040984658 @default.
- W1971720745 hasRelatedWork W2059997984 @default.
- W1971720745 hasRelatedWork W2181867200 @default.
- W1971720745 hasRelatedWork W2319613370 @default.
- W1971720745 hasRelatedWork W2914769698 @default.
- W1971720745 hasRelatedWork W4248719240 @default.
- W1971720745 hasVolume "12" @default.
- W1971720745 isParatext "false" @default.
- W1971720745 isRetracted "false" @default.
- W1971720745 magId "1971720745" @default.
- W1971720745 workType "article" @default.