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- W1971735197 abstract "We measured the electron density of reactive plasma using a plasma oscillation probe and analyzed the mode change of power coupling during etching. The unique behavior of plasmas containing reactive negative ions is clarified. The change in the plasma reactor mode during silicon dioxide etching, from the inductive mode to the capacitive mode with increasing pressure, is investigated." @default.
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- W1971735197 date "2002-06-15" @default.
- W1971735197 modified "2023-10-14" @default.
- W1971735197 title "Measurement of Electron Density of Reactive Plasma Using a Plasma Oscillation Method" @default.
- W1971735197 doi "https://doi.org/10.1143/jjap.41.3963" @default.
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