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• W1971982146 abstract "Design, fabrication and optimization of high refractive index (2.1 @ 1070 nm), sub-micron thickness (200 nm) Tantalum Pentoxide waveguides is reported. Optimization of fabrication parameters reduces the propagation loss to ~ 1 dB/cm @ 1070 nm for Ta₂O₅ waveguides. Ta₂O₅ waveguides were found to be stable for high power application with no significant absorption peaks over a large range of wavelengths (600-1700 nm). Ta₂O₅ waveguides provide high intensity in the evanescent field, which is useful for efficient optical propelling of micro-particles. We have employed Ta₂O₅ waveguide to propel polystyrene micro-particles with 50 μm/s velocity." @default.
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• W1971982146 date "2010-02-11" @default.
• W1971982146 modified "2023-10-16" @default.
• W1971982146 title "Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion" @default.
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• W1971982146 doi "https://doi.org/10.1117/12.840393" @default.
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