Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972036263> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W1972036263 endingPage "148" @default.
- W1972036263 startingPage "143" @default.
- W1972036263 abstract "The capability of CVD silicon oxide has been studied to achieve a controlled air gap between copper interconnects for sub-quarter micron CMOS technologies. Several deposition parameters have been investigated and their influence on air gap morphology and electrical performances are shown in this paper. A reliable process has been obtained from these experiments. The parasitic capacitance between lines is reduced by half using SiO2 air gap material." @default.
- W1972036263 created "2016-06-24" @default.
- W1972036263 creator A5002534389 @default.
- W1972036263 creator A5029897141 @default.
- W1972036263 creator A5030065878 @default.
- W1972036263 creator A5044148491 @default.
- W1972036263 creator A5053193666 @default.
- W1972036263 creator A5075845702 @default.
- W1972036263 creator A5088096794 @default.
- W1972036263 date "2002-01-01" @default.
- W1972036263 modified "2023-10-18" @default.
- W1972036263 title "Optimization of CVD dielectric process to achieve reliable ultra low-k air gaps" @default.
- W1972036263 cites W1546537983 @default.
- W1972036263 cites W2508702393 @default.
- W1972036263 doi "https://doi.org/10.1016/s0167-9317(01)00590-1" @default.
- W1972036263 hasPublicationYear "2002" @default.
- W1972036263 type Work @default.
- W1972036263 sameAs 1972036263 @default.
- W1972036263 citedByCount "8" @default.
- W1972036263 countsByYear W19720362632019 @default.
- W1972036263 countsByYear W19720362632023 @default.
- W1972036263 crossrefType "journal-article" @default.
- W1972036263 hasAuthorship W1972036263A5002534389 @default.
- W1972036263 hasAuthorship W1972036263A5029897141 @default.
- W1972036263 hasAuthorship W1972036263A5030065878 @default.
- W1972036263 hasAuthorship W1972036263A5044148491 @default.
- W1972036263 hasAuthorship W1972036263A5053193666 @default.
- W1972036263 hasAuthorship W1972036263A5075845702 @default.
- W1972036263 hasAuthorship W1972036263A5088096794 @default.
- W1972036263 hasConcept C111919701 @default.
- W1972036263 hasConcept C121332964 @default.
- W1972036263 hasConcept C133386390 @default.
- W1972036263 hasConcept C16317505 @default.
- W1972036263 hasConcept C171250308 @default.
- W1972036263 hasConcept C192562407 @default.
- W1972036263 hasConcept C2779866884 @default.
- W1972036263 hasConcept C41008148 @default.
- W1972036263 hasConcept C49040817 @default.
- W1972036263 hasConcept C61696701 @default.
- W1972036263 hasConcept C98045186 @default.
- W1972036263 hasConceptScore W1972036263C111919701 @default.
- W1972036263 hasConceptScore W1972036263C121332964 @default.
- W1972036263 hasConceptScore W1972036263C133386390 @default.
- W1972036263 hasConceptScore W1972036263C16317505 @default.
- W1972036263 hasConceptScore W1972036263C171250308 @default.
- W1972036263 hasConceptScore W1972036263C192562407 @default.
- W1972036263 hasConceptScore W1972036263C2779866884 @default.
- W1972036263 hasConceptScore W1972036263C41008148 @default.
- W1972036263 hasConceptScore W1972036263C49040817 @default.
- W1972036263 hasConceptScore W1972036263C61696701 @default.
- W1972036263 hasConceptScore W1972036263C98045186 @default.
- W1972036263 hasIssue "1-2" @default.
- W1972036263 hasLocation W19720362631 @default.
- W1972036263 hasOpenAccess W1972036263 @default.
- W1972036263 hasPrimaryLocation W19720362631 @default.
- W1972036263 hasRelatedWork W1516441312 @default.
- W1972036263 hasRelatedWork W1993662404 @default.
- W1972036263 hasRelatedWork W2045924893 @default.
- W1972036263 hasRelatedWork W2355889083 @default.
- W1972036263 hasRelatedWork W2384907096 @default.
- W1972036263 hasRelatedWork W2863738027 @default.
- W1972036263 hasRelatedWork W2890924564 @default.
- W1972036263 hasRelatedWork W2894388424 @default.
- W1972036263 hasRelatedWork W4224274411 @default.
- W1972036263 hasRelatedWork W4253731651 @default.
- W1972036263 hasVolume "60" @default.
- W1972036263 isParatext "false" @default.
- W1972036263 isRetracted "false" @default.
- W1972036263 magId "1972036263" @default.
- W1972036263 workType "article" @default.