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• W1972037650 endingPage "1456" @default.
• W1972037650 startingPage "1452" @default.
• W1972037650 abstract "Cubic boron nitride (c-BN) films were prepared by ion beam assisted deposition (IBAD) technique, and the stresses were primary estimated by measuring the frequency shifts in the infrared-absorption peaks of c-BN samples. To test the possible effects of other factors, dependencies of the c-BN transversal optical mode position on film thickness and c-BN content were investigated. Several methods for reducing the stress of c-BN films including annealing, high temperature deposition, two-stage process, and the addition of a small amount of Si were studied, in which the c-BN films with similar thickness and cubic phase content were used to evaluate the effects of the various stress relief methods. It was shown that all the methods can reduce the stress in c-BN films to various extents. Especially, the incorporation of a small amount of Si (2.3 at.%) can result in a remarkable stress relief from 8.4 to∼3.6 GPa whereas the c-BN content is nearly unaffected, although a slight degradation of the c-BN crystallinity is observed. The stress can be further reduced down below 1 GPa by combination of the addition of Si with the two-stage deposition process." @default.
• W1972037650 created "2016-06-24" @default.
• W1972037650 creator A5024349330 @default.
• W1972037650 creator A5058772219 @default.
• W1972037650 creator A5071706815 @default.
• W1972037650 creator A5073652811 @default.
• W1972037650 creator A5076555024 @default.
• W1972037650 date "2009-02-01" @default.
• W1972037650 modified "2023-09-27" @default.
• W1972037650 title "Comparison and combination of several stress relief methods for cubic boron nitride films deposited by ion beam assisted deposition" @default.
• W1972037650 cites W123044358 @default.
• W1972037650 cites W1497544526 @default.
• W1972037650 cites W1963495603 @default.
• W1972037650 cites W1965722977 @default.
• W1972037650 cites W1965918273 @default.
• W1972037650 cites W1966058886 @default.
• W1972037650 cites W1970367393 @default.
• W1972037650 cites W1975562384 @default.
• W1972037650 cites W1976868164 @default.
• W1972037650 cites W1976911288 @default.
• W1972037650 cites W1978343994 @default.
• W1972037650 cites W1979532453 @default.
• W1972037650 cites W1985411281 @default.
• W1972037650 cites W1996371625 @default.
• W1972037650 cites W2000008582 @default.
• W1972037650 cites W2003283352 @default.
• W1972037650 cites W2009910436 @default.
• W1972037650 cites W2010153527 @default.
• W1972037650 cites W2016430117 @default.
• W1972037650 cites W2019557701 @default.
• W1972037650 cites W2020391882 @default.
• W1972037650 cites W2025146400 @default.
• W1972037650 cites W2028857214 @default.
• W1972037650 cites W2049373690 @default.
• W1972037650 cites W2049898031 @default.
• W1972037650 cites W2055778045 @default.
• W1972037650 cites W2065680880 @default.
• W1972037650 cites W2072138470 @default.
• W1972037650 cites W2083000157 @default.
• W1972037650 cites W2084413392 @default.
• W1972037650 cites W2085880825 @default.
• W1972037650 cites W2093231021 @default.
• W1972037650 cites W2094271234 @default.
• W1972037650 cites W2122443144 @default.
• W1972037650 cites W1973325295 @default.
• W1972037650 doi "https://doi.org/10.1016/j.surfcoat.2008.11.021" @default.
• W1972037650 hasPublicationYear "2009" @default.
• W1972037650 type Work @default.
• W1972037650 sameAs 1972037650 @default.
• W1972037650 citedByCount "11" @default.
• W1972037650 countsByYear W19720376502013 @default.
• W1972037650 countsByYear W19720376502014 @default.
• W1972037650 countsByYear W19720376502016 @default.
• W1972037650 countsByYear W19720376502019 @default.
• W1972037650 crossrefType "journal-article" @default.
• W1972037650 hasAuthorship W1972037650A5024349330 @default.
• W1972037650 hasAuthorship W1972037650A5058772219 @default.
• W1972037650 hasAuthorship W1972037650A5071706815 @default.
• W1972037650 hasAuthorship W1972037650A5073652811 @default.
• W1972037650 hasAuthorship W1972037650A5076555024 @default.
• W1972037650 hasConcept C113196181 @default.
• W1972037650 hasConcept C121332964 @default.
• W1972037650 hasConcept C138885662 @default.
• W1972037650 hasConcept C145148216 @default.
• W1972037650 hasConcept C151730666 @default.
• W1972037650 hasConcept C159985019 @default.
• W1972037650 hasConcept C178790620 @default.
• W1972037650 hasConcept C185592680 @default.
• W1972037650 hasConcept C192562407 @default.
• W1972037650 hasConcept C21036866 @default.
• W1972037650 hasConcept C2777855556 @default.
• W1972037650 hasConcept C2780243435 @default.
• W1972037650 hasConcept C2781463530 @default.
• W1972037650 hasConcept C2816523 @default.
• W1972037650 hasConcept C41895202 @default.
• W1972037650 hasConcept C43617362 @default.
• W1972037650 hasConcept C46275449 @default.
• W1972037650 hasConcept C501308230 @default.
• W1972037650 hasConcept C50774322 @default.
• W1972037650 hasConcept C62520636 @default.
• W1972037650 hasConcept C64297162 @default.
• W1972037650 hasConcept C86803240 @default.
• W1972037650 hasConceptScore W1972037650C113196181 @default.
• W1972037650 hasConceptScore W1972037650C121332964 @default.
• W1972037650 hasConceptScore W1972037650C138885662 @default.
• W1972037650 hasConceptScore W1972037650C145148216 @default.
• W1972037650 hasConceptScore W1972037650C151730666 @default.
• W1972037650 hasConceptScore W1972037650C159985019 @default.
• W1972037650 hasConceptScore W1972037650C178790620 @default.
• W1972037650 hasConceptScore W1972037650C185592680 @default.
• W1972037650 hasConceptScore W1972037650C192562407 @default.
• W1972037650 hasConceptScore W1972037650C21036866 @default.
• W1972037650 hasConceptScore W1972037650C2777855556 @default.
• W1972037650 hasConceptScore W1972037650C2780243435 @default.
• W1972037650 hasConceptScore W1972037650C2781463530 @default.
• W1972037650 hasConceptScore W1972037650C2816523 @default.
• W1972037650 hasConceptScore W1972037650C41895202 @default.
• W1972037650 hasConceptScore W1972037650C43617362 @default.

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