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- W1972051230 abstract "Solvent concentration is an important factor for spin-coated film planarization. Two techniques, one an on-line optical method and the other an off-line gel permeation chromatography method, have been used to investigate the coating concentration change during spinning. The experimental observations are compared with the spin-coating model predictions. The modeled concentration and thickness are in close agreement with experiment. Under certain conditions, the spin-coating model can be significantly simplified. These conditions are discussed." @default.
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- W1972051230 date "1996-04-01" @default.
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- W1972051230 title "Measurement and modeling of solvent removal for spin coating" @default.
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- W1972051230 doi "https://doi.org/10.1002/pen.10489" @default.
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